Patents by Inventor Steven Glanoulakis

Steven Glanoulakis has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for achieving process uniformity by modifying thermal coupling between heater and substrate
    Publication number: 20040016745
    Abstract: The present invention is directed to achieving a desired the process uniformity of a substrate by modifying the distribution of thermal coupling between the substrate and the heater which heats the substrate. In one embodiment, the method comprises establishing a correlation between a uniformity parameter of the process to be performed on the substrate and a surface feature of a heater surface of the heater which is in substantially full contact with a bottom surface of the substrate. The method further comprises determining a desired surface feature of the heater surface of the heater in substantially full contact with the substrate, based on the correlation between the uniformity parameter of the process to be performed on the substrate and the surface feature of the heater surface of the heater, to achieve a preset process uniformity of the uniformity parameter.
    Type: Application
    Filed: May 9, 2003
    Publication date: January 29, 2004
    Applicant: Applied Materials, Inc.
    Inventors: David P. Sun, Steven Glanoulakis