Patents by Inventor Steven Glenn Meester

Steven Glenn Meester has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Titanium silicide process
    Patent number: 5686359
    Abstract: The specification describes a process for siliciding silicon metallization with titanium. The process requires two anneal steps and is based on careful control of operating parameters during the first anneal step. A prescription is given relating time and temperature of anneal, and titanium film thickness, to silicide resistivity. Proper choice of parameters also minimizes variables in the process.
    Type: Grant
    Filed: December 7, 1995
    Date of Patent: November 11, 1997
    Assignee: Lucent Technologies Inc.
    Inventors: Steven Glenn Meester, Arun Kumar Nanda, Cletus Walter Wilkins