Abstract: The invention relates to a method of fabrication of staggered vertical comb drive actuators with relaxed lateral alignment tolerances. A device layer of a wafer is first etched from a front side using a self-aligned two-layer mask to define interdigited fingers of both moving and stationary combs. A second etch step is used for vertically thinning one of the two sets of fingers by selectively removing their top portions. The front side of the wafer is then bonded to a carrier wafer. The wafer is then selectively etched from the back side of the device layer so as to remove lower portions of the second set of fingers, thereby forming interdigited moving and stationary combs having vertically offset fingers.

Abstract: The invention relates to a method of fabrication of staggered vertical comb drive actuators with relaxed lateral alignment tolerances. A device layer of a wafer is first etched from a front side using a self-aligned two-layer mask to define interdigited fingers of both moving and stationary combs. A second etch step is used for vertically thinning one of the two sets of fingers by selectively removing their top portions. The front side of the wafer is then bonded to a carrier wafer. The wafer is then selectively etched from the back side of the device layer so as to remove lower portions of the second set of fingers, thereby forming interdigited moving and stationary combs having vertically offset fingers.

Abstract: A low insertion loss, wide bandwidth, microwave switch has a superconducting transmission line that can reversibly go from a superconducting state to a normal state by the application of a DC voltage. When in the normal state, the switch is "off" and microwave signals are attenuated. To reduce the voltage necessary to cause switching, the width of the transmission line is decreased. This decrease in voltage is accomplished in a controlled manner so that there are no spurious reflections produced on the line, resulting in a wide operating bandwidth. Previous microwave switches use other means to switch between superconducting and normal and suffer from disadvantages such as relatively slow switching time, complexity or narrow bandwidths as a result.