Patents by Inventor Steven Hansen

Steven Hansen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Device manufacturing method
    Publication number: 20050007573
    Abstract: A rectangular or bar-shaped, on-axis illumination mask with radiation polarized parallel to the length of the bar provides improved DOF and exposure latitude with less lens heating as compared to a circular monopole with equivalent ?.
    Type: Application
    Filed: April 2, 2004
    Publication date: January 13, 2005
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Steven Hansen, Donis Flagello, Michel Fransois Klaassen, Laurentius De Winter, Edwin Wilhelmus Knols