Patents by Inventor Steven J. Lakeman

Steven J. Lakeman has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • IN-SITU ION SOURCE CLEANING FOR PARTIAL PRESSURE ANALYZERS USED IN PROCESS MONITORING
    Publication number: 20090014644
    Abstract: An ion source apparatus for partial pressure analyzers and in-situ cleaning method thereof based on inducing a hollow cathode discharge (HCD) inside the ion source. The HCD is formed by applying a high negative voltage to one or more parts of the ion source, including the anode electrode, the lens focus plate and at least one other lens or other form of plate, such as a total pressure collector plate.
    Type: Application
    Filed: July 10, 2008
    Publication date: January 15, 2009
    Applicant: Inficon, Inc.
    Inventors: Chenglong Yang, Jeffrey P. Merrill, Louis C. Frees, Steven J. Lakeman
  • Inter-process sensing of wafer outcome
    Patent number: 7257494
    Abstract: A method of monitoring a microelectronic manufacturing process includes the implementation of a monitoring sensor that is configured to operate in an inter-process mode. During an inter-process mode, a first valve is opened in order to initiate transfer of a processing substrate between at least one processing chamber and a transfer chamber. The monitoring sensor is programmed to monitor the interior of the at least one processing chamber only after the first valve is opened.
    Type: Grant
    Filed: May 11, 2005
    Date of Patent: August 14, 2007
    Assignee: Inficon, Inc.
    Inventors: William T. Conner, Craig Garvin, Steven J. Lakeman, Igor Tepermeister, Chenglong Yang