Patents by Inventor Steven Joseph LAROSA

Steven Joseph LAROSA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SUBSTRATE SUPPORT PEDESTAL
    Publication number: 20230019718
    Abstract: The systems and methods discussed herein are associated with substrate support pedestals used in processing chambers to manufacture semiconductors, electronics, optics, and other devices. The substrate support pedestals include an electrostatic chuck body bonded to a cooling base via a bond layer. A gas flow passage is formed between a top surface of the electrostatic chuck body and a bottom surface of the cooling base, and a porous plug is positioned in the gas flow passage. The gas flow passage passes through a hole in the bond layer and the porous plug and has a swept volume physically shielded from an inside edge of the hole in the bond layer, protecting the bond layer from erosion.
    Type: Application
    Filed: September 26, 2022
    Publication date: January 19, 2023
    Inventors: Steven Joseph LAROSA, Stephen PROUTY
  • Substrate support pedestal
    Patent number: 11456161
    Abstract: The systems and methods discussed herein are associated with substrate support pedestals used in processing chambers to manufacture semiconductors, electronics, optics, and other devices. The substrate support pedestals include an electrostatic chuck body bonded to a cooling base via a bond layer. A gas flow passage is formed between a top surface of the electrostatic chuck body and a bottom surface of the cooling base, and a porous plug is positioned in the gas flow passage. The gas flow passage passes through a hole in the bond layer and the porous plug and has a swept volume physically shielded from an inside edge of the hole in the bond layer, protecting the bond layer from erosion.
    Type: Grant
    Filed: May 24, 2019
    Date of Patent: September 27, 2022
    Assignee: Applied Materials, Inc.
    Inventors: Steven Joseph Larosa, Stephen Prouty
  • SUBSTRATE SUPPORT PEDESTAL
    Publication number: 20190371578
    Abstract: The systems and methods discussed herein are associated with substrate support pedestals used in processing chambers to manufacture semiconductors, electronics, optics, and other devices. The substrate support pedestals include an electrostatic chuck body bonded to a cooling base via a bond layer. A gas flow passage is formed between a top surface of the electrostatic chuck body and a bottom surface of the cooling base, and a porous plug is positioned in the gas flow passage. The gas flow passage passes through a hole in the bond layer and the porous plug and has a swept volume physically shielded from an inside edge of the hole in the bond layer, protecting the bond layer from erosion.
    Type: Application
    Filed: May 24, 2019
    Publication date: December 5, 2019
    Inventors: Steven Joseph LAROSA, Stephen PROUTY