Patents by Inventor Steven Keetai Park

Steven Keetai Park has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods and arrangements for improved formation of control and floating gates in non-volatile memory semiconductor devices
    Patent number: 6258669
    Abstract: Methods and arrangements are provided to increase the process control during the fabrication of the floating/control gate configuration in a non-volatile memory semiconductor device. The methods and arrangements effectively reduce the severity of the topology attributable to the space between adjacent floating gates. The altered topology allows a subsequently formed control gate to be formed without significant surface depressions. Significant surface depressions in the control gate can lead to cracks in the silicide layer that is formed on the control gate. The cracking usually occurs during subsequent thermal processing of the semiconductor device. Thus the disclosed methods and arrangements prevent cracking of the silicide layer on the control gate, which can affect the performance of the semiconductor device by increasing the resistance of the control gate arrangement.
    Type: Grant
    Filed: December 18, 1997
    Date of Patent: July 10, 2001
    Assignee: Advanced Micro Devices, Inc.
    Inventor: Steven Keetai Park