Patents by Inventor Steven Kenneth Christie

Steven Kenneth Christie has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods and apparatuses for chemical delivery for brush conditioning
    Patent number: 11923208
    Abstract: Provided is disclosure for embodiments providing delivery of chemicals for conditioning a brush offline, where the brush is not coupled to a machine that makes use of the brush to clean a surface of an object.
    Type: Grant
    Filed: May 19, 2017
    Date of Patent: March 5, 2024
    Assignee: ILLINOIS TOOL WORKS INC.
    Inventors: Bradley Scott Withers, Corey Alan Hughes, Erik Scott Nelson, Steven Kenneth Christie, Brent Allan Best
  • Methods and apparatuses for effluent monitoring for brush conditioning
    Patent number: 11205582
    Abstract: A system for monitoring contamination level of effluent of an offline brush conditioning system includes a first set of reservoirs configured to collect first effluents from corresponding portions of a first brush and a second set of reservoirs configured to collect second effluents from corresponding portions of a second brush, and the first and second effluents are from a fluid used to condition the first and second brushes that are configured to clean a surface of a semiconductor wafer. An effluent contamination monitor is configured to monitor contamination levels of the first and second effluents, wherein the monitored contamination levels may provide feedback for use in the brush conditioning.
    Type: Grant
    Filed: September 9, 2019
    Date of Patent: December 21, 2021
    Assignee: Illinois Tool Works Inc.
    Inventors: Bradley Scott Withers, Corey Alan Hughes, Erik Scott Nelson, Steven Kenneth Christie, Brent Allan Best
  • METHODS AND APPARATUSES FOR EFFLUENT MONITORING FOR BRUSH CONDITIONING
    Publication number: 20200006162
    Abstract: Provided is a disclosure for embodiments that perform effluent monitoring for brush conditioning, where the monitored data may be fed back for use in the conditioning.
    Type: Application
    Filed: September 9, 2019
    Publication date: January 2, 2020
    Inventors: Bradley Scott Withers, Corey Alan Hughes, Erik Scott Nelson, Steven Kenneth Christie, Brent Allan Best
  • Methods and apparatuses for effluent monitoring for brush conditioning
    Patent number: 10410936
    Abstract: An example system for monitoring contamination level of effluent of an offline brush conditioning system includes a first reservoir configured to collect a first effluent from a first portion of a brush in the offline brush conditioning system and a second reservoir configured to collect a second effluent from a second portion of the brush, where the second portion is different from the first portion, and the first and second effluents are from a fluid used to condition a brush configured to clean a surface of a semiconductor wafer. An effluent contamination monitor is configured to monitor a first contamination level of the first effluent and a second contamination level of the second effluent.
    Type: Grant
    Filed: May 19, 2017
    Date of Patent: September 10, 2019
    Assignee: Illinois Tool Works Inc.
    Inventors: Bradley Scott Withers, Corey Alan Hughes, Erik Scott Nelson, Steven Kenneth Christie, Brent Allan Best
  • Methods and apparatuses for wireless communication with a brush
    Patent number: 10405166
    Abstract: Provided is a disclosure for embodiments for a brush with communication capabilities, which is configured to clean a surface of, for example, a semiconductor wafer, as well as an offline brush conditioning system and a CMP system that can communicate with the brush.
    Type: Grant
    Filed: August 29, 2018
    Date of Patent: September 3, 2019
    Assignee: Illinois Tool Works Inc.
    Inventors: Bradley Scott Withers, Corey Alan Hughes, Erik Scott Nelson, Steven Kenneth Christie, Brent Allan Best
  • METHODS AND APPARATUSES FOR WIRELESS COMMUNICATION WITH A BRUSH
    Publication number: 20190014460
    Abstract: Provided is a disclosure for embodiments for a brush with communication capabilities, which is configured to clean a surface of, for example, a semiconductor wafer, as well as an offline brush conditioning system and a CMP system that can communicate with the brush.
    Type: Application
    Filed: August 29, 2018
    Publication date: January 10, 2019
    Inventors: Bradley Scott Withers, Corey Alan Hughes, Erik Scott Nelson, Steven Kenneth Christie, Brent Allan Best
  • METHODS AND APPARATUSES FOR WIRELESS COMMUNICATION WITH A BRUSH
    Publication number: 20180352367
    Abstract: Provided is a disclosure for embodiments for a brush with communication capabilities, which is configured to clean a surface of, for example, a semiconductor wafer, as well as an offline brush conditioning system and a CMP system that can communicate with the brush.
    Type: Application
    Filed: May 30, 2017
    Publication date: December 6, 2018
    Inventors: Bradley Scott Withers, Corey Alan Hughes, Erik Scott Nelson, Steven Kenneth Christie, Brent Allan Best
  • Methods and apparatuses for wireless communication with a brush
    Patent number: 10149135
    Abstract: Provided is a disclosure for embodiments for a brush with communication capabilities, which is configured to clean a surface of, for example, a semiconductor wafer, as well as an offline brush conditioning system and a CMP system that can communicate with the brush.
    Type: Grant
    Filed: May 30, 2017
    Date of Patent: December 4, 2018
    Assignee: Illinois Tool Works Inc.
    Inventors: Bradley Scott Withers, Corey Alan Hughes, Erik Scott Nelson, Steven Kenneth Christie, Brent Allan Best
  • METHODS AND APPARATUSES FOR EFFLUENT MONITORING FOR BRUSH CONDITIONING
    Publication number: 20180337102
    Abstract: Provided is a disclosure for embodiments that perform effluent monitoring for brush conditioning, where the monitored data may be fed back for use in the conditioning.
    Type: Application
    Filed: May 19, 2017
    Publication date: November 22, 2018
    Inventors: Bradley Scott Withers, Corey Alan Hughes, Erik Scott Nelson, Steven Kenneth Christie, Brent Allan Best
  • METHODS AND APPARATUSES FOR CHEMICAL DELIVERY FOR BRUSH CONDITIONING
    Publication number: 20180337071
    Abstract: Provided is disclosure for embodiments providing delivery of chemicals for conditioning a brush offline, where the brush is not coupled to a machine that makes use of the brush to clean a surface of an object.
    Type: Application
    Filed: May 19, 2017
    Publication date: November 22, 2018
    Inventors: Bradley Scott Withers, Corey Alan Hughes, Erik Scott Nelson, Steven Kenneth Christie, Brent Allan Best