Patents by Inventor Steven Kirk Bowling

Steven Kirk Bowling has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for a tungsten silicide etch
    Patent number: 6869885
    Abstract: A tungsten silicide etch process allows for a high etch rate and about 90° sidewall profiles of etched features. According to an example embodiment, a substrate is placed into an etch zone and a process gas comprising SF6, He, HBr, and a chlorine-containing gas is introduced in the etch zone. A plasma is generated in the etch zone to form an etch gas from the process gas that anisotropically etches the tungsten silicide layer.
    Type: Grant
    Filed: December 17, 1999
    Date of Patent: March 22, 2005
    Assignee: Koninklijke Philips Electronics N.V.
    Inventor: Steven Kirk Bowling