Patents by Inventor Steven Krouse

Steven Krouse has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20070218204
    Abstract: An apparatus for treatment a substrate with an activated reactive gas which includes a processing chamber, an exhaust manifold, a conveyor adapted to sequentially introduce into the processing chamber untreated portions of the substrate for said treatment and to sequentially remove from the processing chamber treated portions of the substrate, wherein the length of the substrate exceeds a dimension of the inner volume of the processing chamber, a distribution conduit disposed in the processing chamber, wherein the length of the distribution conduit is approximately equal to the width of the substrate, and wherein the distribution conduit has a number (N) of openings, each opening has a cross sectional area (Ao), a cross sectional area of the distribution conduit (Ac), and wherein a maximum cross-sectional area (N*Ao) of the openings can be determined by the following expression: 1.0*Ac>N*Ao?0.1*Ac.
    Type: Application
    Filed: March 21, 2007
    Publication date: September 20, 2007
    Inventors: Diwakar Garg, Steven Krouse, Eric Robertson, Pingping Ma
  • Publication number: 20060062914
    Abstract: An apparatus and process for treating at least a portion of the surface of a substrate is described herein. In one aspect, the apparatus a processing chamber comprising an inner volume, the substrate, and an exhaust manifold; an activated reactive gas supply source wherein a process gas comprising one or more reactive gases and optionally an additive gas is activated by one or more energy sources to provide the activated reactive gas; and a distribution conduit, which is in fluid communication with the inner volume and the supply source, comprising: a plurality of openings that direct the activated reactive gas into the inner volume, wherein the activated reactive gas contacts the surface and provides a spent activated reactive gas and/or volatile products that are withdrawn from the inner volume through the exhaust manifold.
    Type: Application
    Filed: March 15, 2005
    Publication date: March 23, 2006
    Inventors: Diwakar Garg, Steven Krouse, Eric Robertson