Abstract: Methods for consistent updates to APC models with partitioning along multiple components are generally described. In one example, a method includes acquiring measurement data from one or more semiconductor wafers of a processed first lot, the data having a plurality of contexts, applying a model having parameters with partitioning along the contexts to the measurement data; and applying a constraint on a subset of the model parameters such that the subset remains centered around zero to provide consistent updates for automated process control of lots processed after the first lot.

Abstract: Methods for consistent updates to APC models with partitioning along multiple components are generally described. In one example, a method includes acquiring measurement data from one or more semiconductor wafers of a processed first lot, the data having a plurality of contexts, applying a model having parameters with partitioning along the contexts to the measurement data; and applying a constraint on a subset of the model parameters such that the subset remains centered around zero to provide consistent updates for automated process control of lots processed after the first lot.

Abstract: In one embodiment, an apparatus and method for automated dynamic recipe generation and selection for semiconductor manufacturing are disclosed. In one embodiment, the method comprises: receiving a lot at a tool of a semiconductor manufacturing system; making, by a host controller for the tool, a lookup recipe call to an automated dynamic recipe generation and selection (ADRS) system; running, by the ADRS system, logic scripts to create a unique recipe instruction set for the particular tool and lot, the logic scripts to utilize at least one of results from past runs associated with the tool, historical statistical process control (SPC) system analysis results, and a context of the lookup recipe call in order to create the unique recipe instruction set; and returning the unique recipe instruction set to the host controller to be run by the tool on the lot.

Abstract: An apparatus for holding a substrate includes a shelf capable of holding the substrate; a body which encloses the shelf, the body having an open side; and an outer door frame pivotally coupled to the body and defining an opening. The apparatus also includes an inner door which fits into the opening. The body's open side is substantially covered by the inner door and by the outer door frame when the inner door and outer door frame are in closed positions. The apparatus can include a double hinge for pivotally coupling the outer door frame to the body. It can also include a bolt that is movably attached to the inner door, so that the inner door has a locked position in which the bolt extends into the frame and an unlocked position in which the bolt retracts from the frame.

Abstract: An apparatus for holding a substrate includes a shelf capable of holding the substrate; a body which encloses the shelf, the body having an open side; and an outer door frame pivotally coupled to the body and defining an opening. The apparatus also includes an inner door which fits into the opening. The body's open side is substantially covered by the inner door and by the outer door frame when the inner door and outer door frame are in closed positions. The apparatus can include a double hinge for pivotally coupling the outer door frame to the body. It can also include a bolt that is movably attached to the inner door, so that the inner door has a locked position in which the bolt extends into the frame and an unlocked position in which the bolt retracts from the frame.

Abstract: A star stud adjuster apparatus including an adjuster. The adjuster includes a J-shaped support with an exterior surface having a pair of brackets projecting therefrom. The adjuster includes a handle with a forked end that is capable of being positioned between the brackets. Also provided is a cylindrical member. The cylindrical member has a pair of side surfaces with each having a ratchet integral thereto and projecting therefrom. The cylindrical member is positionable between the forked ends and held in place with an axial rod. Banding material is included. The banding material is weaved around a plurality of bowed studs and is secured by a nail to one of the bowed studs. The banding material is capable of being positioned around the cylindrical member between the forked end when the adjuster is positioned on an opposite stud.