Abstract: According to method embodiments of the present invention, a method for cleaning a microelectronic substrate includes placing the substrate in a pressure chamber. A process fluid including dense phase CO2 is circulated through the chamber such that the process fluid contacts the substrate. The phase of the CO2 is cyclically modulated during at least a portion of the step of circulating the process fluid.

Abstract: A linear operating mechanism for a slotted optical switch 10 which produces a guaranteed OFF-point for a consistent linear displacement of a switch operator 58 with respect to a reference surface 66 of the device enclosure 62. The guaranteed OFF-point is consistently repeatable from one device to another. The device enclosure 62 defines an integrally formed support for receiving an emitter 14 and a receiver 18 of the slotted optical switch 10. The enclosure 62 further defines a fixed Off-plane 114 immediately adjacent the receiver 18 and precisely located with respect to a reference surface 66 on an outside surface of the enclosure 62. The switch operator 58 is received within the optical switch slot and has a distal end 86 extending outside the enclosure 62 a precise distance with respect to the reference surface 66 when the operator is in a normally biased first position.