Patents by Inventor Steven M. Zungia

Steven M. Zungia has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Polishing head with membrane position control
    Patent number: 11623320
    Abstract: A carrier head for chemical mechanical polishing includes a housing for attachment to a drive shaft, a membrane assembly beneath the housing with a space between the housing and the membrane assembly defining a pressurizable chamber, and a sensor in the housing configured to measure a distance from the sensor to the membrane assembly.
    Type: Grant
    Filed: December 6, 2019
    Date of Patent: April 11, 2023
    Assignee: Applied Materials, Inc.
    Inventors: Steven M. Zungia, Jay Gurusamy