Patents by Inventor Steven Michael BILODEAU

Steven Michael BILODEAU has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SILICON NITRIDE ETCHING COMPOSITION AND METHOD
    Publication number: 20230295502
    Abstract: Compositions useful for the selective removal of silicon nitride materials relative to polysilicon, silicon oxide materials and/or silicide materials from a microelectronic device having same thereon are provided. The compositions of the invention are particularly useful in the etching of 3D NAND structures.
    Type: Application
    Filed: May 24, 2023
    Publication date: September 21, 2023
    Inventors: Steven Michael BILODEAU, SeongJin HONG, Hsing-Chen WU, Min-Chieh YANG, Emanuel I. COOPER
  • Silicon nitride etching composition and method
    Patent number: 11697767
    Abstract: Compositions useful for the selective removal of silicon nitride materials relative to polysilicon, silicon oxide materials and/or silicide materials from a microelectronic device having same thereon are provided. The compositions of the invention are particularly useful in the etching of 3D NAND structures.
    Type: Grant
    Filed: June 7, 2021
    Date of Patent: July 11, 2023
    Assignee: ENTEGRIS, INC.
    Inventors: Steven Michael Bilodeau, SeongJin Hong, Hsing-Chen Wu, Min-Chieh Yang, Emanuel I. Cooper
  • SILICON NITRIDE ETCHING COMPOSITION AND METHOD
    Publication number: 20210296136
    Abstract: Compositions useful for the selective removal of silicon nitride materials relative to polysilicon, silicon oxide materials and/or silicide materials from a microelectronic device having same thereon are provided. The compositions of the invention are particularly useful in the etching of 3D NAND structures.
    Type: Application
    Filed: June 7, 2021
    Publication date: September 23, 2021
    Inventors: Steven Michael BILODEAU, SeongJin HONG, Hsing-Chen WU, Min-Chieh YANG, Emanuel I. COOPER