Patents by Inventor Steven Michael Zimmerman

Steven Michael Zimmerman has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10310391
    Abstract: An electrostatic clamp (300) and a method for manufacturing the same is disclosed. The electrostatic clamp includes a first layer (302) having a first ultra-low expansion (ULE) material, a second layer (304) coupled to the first layer, having a second ULE material, and a third layer (306), coupled to the second layer, having a third ULE material. The electrostatic clamp further includes a plurality of fluid channels (316) located between the first layer and the second layer and a composite layer (308) interposed between the second layer and the third layer. The method for manufacturing the electrostatic clamp includes forming the plurality of fluid channels, disposing the composite layer on the third layer, and coupling the third layer to the second layer. The plurality of fluid channels is configured to carry a thermally conditioned fluid for temperature regulation of a clamped object.
    Type: Grant
    Filed: July 9, 2015
    Date of Patent: June 4, 2019
    Assignee: ASML Holding N.V.
    Inventors: Matthew Lipson, Vincent Dimilia, Ronald Peter Totillo, Tammo Uitterdijk, Steven Michael Zimmerman
  • Patent number: 10274842
    Abstract: An electrostatic clamp (300) and a method for manufacturing the same is disclosed. The electrostatic clamp includes a first layer (302) having a first ultra-low expansion (ULE) material, a second layer (304) coupled to the first layer, having a second ULE material, and a third layer (306), coupled to the second layer, having a third ULE material. The electrostatic clamp further includes a plurality of fluid channels (316) located between the first layer and the second layer and a composite layer (308) interposed between the second layer and the third layer. The method for manufacturing the electrostatic clamp includes forming the plurality of fluid channels, disposing the composite layer on the third layer, and coupling the third layer to the second layer. The plurality of fluid channels is configured to carry a thermally conditioned fluid for temperature regulation of a clamped object.
    Type: Grant
    Filed: July 9, 2015
    Date of Patent: April 30, 2019
    Assignee: ASML Holding N.V.
    Inventors: Matthew Lipson, Vincent Dimilia, Ronald Peter Totillo, Tammo Uitterdijk, Steven Michael Zimmerman
  • Publication number: 20170242345
    Abstract: An electrostatic clamp (300) and a method for manufacturing the same is disclosed. The electrostatic clamp includes a first layer (302) having a first ultra-low expansion (ULE) material, a second layer (304) coupled to the first layer, having a second ULE material, and a third layer (306), coupled to the second layer, having a third ULE material. The electrostatic clamp further includes a plurality of fluid channels (316) located between the first layer and the second layer and a composite layer (308) interposed between the second layer and the third layer. The method for manufacturing the electrostatic clamp includes forming the plurality of fluid channels, disposing the composite layer on the third layer, and coupling the third layer to the second layer. The plurality of fluid channels is configured to carry a thermally conditioned fluid for temperature regulation of a clamped object.
    Type: Application
    Filed: July 9, 2015
    Publication date: August 24, 2017
    Applicant: ASML Holding N.V.
    Inventors: Matthew LIPSON, Vincent DIMILIA, Ronald Peter TOTILLO, Tammo UITTERDIJK, Steven Michael ZIMMERMAN
  • Publication number: 20080281642
    Abstract: This is a business method for concrete coverage insurance and warranty or service contracts for home or business owners calculated by figuring the square footage of an area. The premium is figured by demographics with deductibles in place for high or low loss. Policy duration will be determined by experience of loss, but for the time being, will last for five (5) years and will be transferable. This is possible using all the technology an insurance company has to offer in the industry today with inspections on an annual basis. This will be coverage that is not now written by any company. It is a valuable business asset to a concrete company in the business of repair and new and replacement concrete. The trained inspector will catch problems before they become major structural problems. At the same time, the company will be training property owners on loss prevention and maintaining their concrete.
    Type: Application
    Filed: May 7, 2008
    Publication date: November 13, 2008
    Inventor: Steven Michael Zimmerman
  • Patent number: 4036644
    Abstract: Carboxylic acids are included in resists to increase their speed and adhesion.
    Type: Grant
    Filed: January 15, 1975
    Date of Patent: July 19, 1977
    Assignee: International Business Machines Corporation
    Inventors: Leon H. Kaplan, John Baldwin Lounsbury, Steven Michael Zimmerman