Patents by Inventor Steven P. Goehringer

Steven P. Goehringer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Polishing of semiconductor substrates
    Patent number: 6641631
    Abstract: An aqueous polishing composition having abrasive particles of a metal oxide has a pH that undergoes pH drift, because ions are provided by dissolution of the metal oxide, and the pH drift is minimized by providing the aqueous polishing composition with an equilibrium concentration of the ions at said pH.
    Type: Grant
    Filed: February 6, 2002
    Date of Patent: November 4, 2003
    Assignee: Rodel Holdings, Inc.
    Inventors: Terence M. Thomas, Craig D. Lack, Steven P. Goehringer
  • Polishing of semiconductor substrates
    Publication number: 20020083650
    Abstract: An aqueous polishing composition having abrasive particles of a metal oxide has a pH that undergoes pH drift, because ions are provided by dissolution of the metal oxide, and the pH drift is minimized by providing the aqueous polishing composition with an equilibrium concentration of the ions at said pH.
    Type: Application
    Filed: February 6, 2002
    Publication date: July 4, 2002
    Inventors: Terence M. Thomas, Craig D. Lack, Steven P. Goehringer
  • Polishing compositions for semiconductor substrates
    Patent number: 6379406
    Abstract: This invention provides a polishing composition with a stable pH for use in CMP of semiconductor substrates comprising: high-purity submicron particles of a metal oxide and a soluble metal salt of the metal oxide. The metal salt is present in a proportionate amount to adjust the aqueous concentration of metal ions to the equilibrium solubility of the metal oxide at the desired pH of the polishing composition.
    Type: Grant
    Filed: December 11, 2000
    Date of Patent: April 30, 2002
    Assignee: Rodel Holdings, Inc.
    Inventors: Terence M. Thomas, Craig D. Lack, Steven P. Goehringer