Patents by Inventor Steven P. Warnert

Steven P. Warnert has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Processing chamber mixing systems
    Patent number: 11721527
    Abstract: Exemplary processing systems may include a processing chamber, and may include a remote plasma unit coupled with the processing chamber. Exemplary systems may also include a mixing manifold coupled between the remote plasma unit and the processing chamber. The mixing manifold may be characterized by a first end and a second end opposite the first end, and may be coupled with the processing chamber at the second end. The mixing manifold may define a central channel through the mixing manifold, and may define a port along an exterior of the mixing manifold. The port may be fluidly coupled with a first trench defined within the first end of the mixing manifold. The first trench may be characterized by an inner radius at a first inner sidewall and an outer radius, and the first trench may provide fluid access to the central channel through the first inner sidewall.
    Type: Grant
    Filed: January 7, 2019
    Date of Patent: August 8, 2023
    Assignee: Applied Materials, Inc.
    Inventors: Ganesh Subbuswamy, Steven P. Warnert
  • PROCESSING CHAMBER MIXING SYSTEMS
    Publication number: 20200215566
    Abstract: Exemplary processing systems may include a processing chamber, and may include a remote plasma unit coupled with the processing chamber. Exemplary systems may also include a mixing manifold coupled between the remote plasma unit and the processing chamber. The mixing manifold may be characterized by a first end and a second end opposite the first end, and may be coupled with the processing chamber at the second end. The mixing manifold may define a central channel through the mixing manifold, and may define a port along an exterior of the mixing manifold. The port may be fluidly coupled with a first trench defined within the first end of the mixing manifold. The first trench may be characterized by an inner radius at a first inner sidewall and an outer radius, and the first trench may provide fluid access to the central channel through the first inner sidewall.
    Type: Application
    Filed: January 7, 2019
    Publication date: July 9, 2020
    Applicant: Applied Materials, Inc.
    Inventors: Ganesh Subbuswamy, Steven P. Warnert