Patents by Inventor Steven Parks

Steven Parks has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System and method for protection of vacuum seals in plasma processing systems
    Patent number: 10049858
    Abstract: Systems and methods for protecting vacuum seals in a plasma processing system are provided. The processing system can include a vacuum chamber defining a sidewall and an inductive coil wrapped around at least a portion of the sidewall. A vacuum seal can be positioned between the sidewall of the vacuum chamber and a heat sink. A thermally conductive bridge can be coupled between the sidewall and heat sink. Further, the thermally conductive bridge can be positioned relative to the vacuum seal such that the thermally conductive bridge redirects a conductive heat path from the sidewall or any heat source to the heat sink so that the heat path bypasses the vacuum seal.
    Type: Grant
    Filed: May 9, 2014
    Date of Patent: August 14, 2018
    Assignee: MATTSON TECHNOLOGY, INC.
    Inventors: Vladimir Nagorny, Steven Parks, Martin Zucker
  • System and Method for Protection of Vacuum Seals in Plasma Processing Systems
    Publication number: 20160013025
    Abstract: Systems and methods for protecting vacuum seals in a plasma processing system are provided. The processing system can include a vacuum chamber defining a sidewall and an inductive coil wrapped around at least a portion of the sidewall. A vacuum seal can be positioned between the sidewall of the vacuum chamber and a heat sink. A thermally conductive bridge can be coupled between the sidewall and heat sink. Further, the thermally conductive bridge can be positioned relative to the vacuum seal such that the thermally conductive bridge redirects a conductive heat path from the sidewall or any heat source to the heat sink so that the heat path bypasses the vacuum seal.
    Type: Application
    Filed: May 9, 2014
    Publication date: January 14, 2016
    Applicant: Mattson Technology, Inc.
    Inventors: Vladimir Nagorny, Steven Parks, Martin Zucker
  • Shock tube apparatus for blast wave simulation
    Patent number: 9027383
    Abstract: This is directed to systems, processes, machines, and other means that simulate blast waves from explosive events. The invention can make waveforms tailored to a user's preference to accurately model a variety of explosive events by utilizing a driver section and a transition section that have divergent geometries.
    Type: Grant
    Filed: August 15, 2011
    Date of Patent: May 12, 2015
    Assignee: ORA, Inc.
    Inventors: David V Ritzel, Steven Parks
  • Shock Tube Apparatus for Blast Wave Simulation
    Publication number: 20130042665
    Abstract: This is directed to systems, processes, machines, and other means that simulate blast waves from explosive events. The invention can make waveforms tailored to a user's preference to accurately model a variety of explosive events by utilizing a driver section and a transition section that have divergent geometries.
    Type: Application
    Filed: August 15, 2011
    Publication date: February 21, 2013
    Applicant: ORA, INC.
    Inventors: David V. Ritzel, Steven Parks
  • Lift trailer device
    Publication number: 20060210381
    Abstract: A lift trailer device configured to load and unload a payload from the ground or a loading dock or any height inbetween.
    Type: Application
    Filed: March 7, 2005
    Publication date: September 21, 2006
    Inventors: Cristan Pollnow, Steven Parks