Abstract: An aqueous heat transfer fluid comprising a C3 carboxylate freezing point depressant, either solely or in combination with C3-C5 carboxylate freezing point depressants, in combination with C6-C16 organic acid salt corrosion inhibitors, provides an antifreeze/coolant composition wherein the corrosion inhibitors exhibit uniquely enhanced solubility, especially at low temperatures, in synergistic combination with the selected carboxylate freezing point depressants.

Abstract: An apparatus and method for a gas distribution plate is provided. The gas distribution plate has a first manifold which includes a plurality of concentric channels for providing at least two distinct gases to a processing zone above a substrate. A portion of the plurality of channels perform a thermal control function and are separated from the remaining channels, which provide separated gas flow channels within the gas distribution plate. The gas flow channels are in fluid communication with a second manifold which includes a plurality of concentric rings. Apertures formed in the rings are in fluid communication with the gas flow channels and the processing zone. The gases are provided to the processing zone above the substrate, and do not mix within the gas distribution plate.

Abstract: A method and apparatus for a modular processing system is described. The apparatus includes a transfer chamber as the foundation for the system and includes sidewalls adapted to receive at least three 200 mm and/or 300 mm process chambers. The transfer chamber includes a robot capable of withstanding high temperatures and is configured to transfer 200 mm and 300 mm substrates. The modularity of the transfer chamber is highly transportable and provides a research and development platform at a low cost of ownership and may be modularly built into a production system as additional chambers and peripheral hardware is added.

Abstract: An aqueous heat transfer fluid comprising a C3 carboxylate freezing point depressant, either solely or in combination with C3-C5 carboxylate freezing point depressants, in combination with C6-C16 organic acid salt corrosion inhibitors, provides an antifreeze/coolant composition wherein the corrosion inhibitors exhibit uniquely enhanced solubility, especially at low temperatures, in synergistic combination with the selected carboxylate freezing point depressants.