Patents by Inventor Steven R. Volk

Steven R. Volk has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Process for fabricating a microelectromechanical structure
    Patent number: 6808952
    Abstract: A process is disclosed for forming a microelectromechanical (MEM) structure on a substrate having from 5 to 6 or more layers of deposited and patterned polysilicon. The process is based on determining a radius of curvature of the substrate which is bowed due to accumulated stress in the layers of polysilicon and a sacrificial material used to buildup the MEM structure, and then providing one or more stress-compensation layers on a backside of the substrate to flatten the substrate and allow further processing.
    Type: Grant
    Filed: September 5, 2002
    Date of Patent: October 26, 2004
    Assignee: Sandia Corporation
    Inventors: Jeffry J. Sniegowski, Thomas W. Krygowski, Seethambal S. Mani, Scott D. Habermehl, Dale L. Hetherington, James E. Stevens, Paul J. Resnick, Steven R. Volk