Patents by Inventor Steven S. Chiang

Steven S. Chiang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
    Patent number: 6969635
    Abstract: A method for forming a MEMS device is disclosed, where a final release step is performed just prior to a wafer bonding step to protect the MEMS device from contamination, physical contact, or other deleterious external events. Without additional changes to the MEMS structure between release and wafer bonding and singulation, except for an optional stiction treatment, the MEMS device is best protected and overall process flow is improved. The method is applicable to the production of any MEMS device and is particularly beneficial in the making of fragile micromirrors.
    Type: Grant
    Filed: December 3, 2001
    Date of Patent: November 29, 2005
    Assignee: Reflectivity, Inc.
    Inventors: Satyadev R. Patel, Andrew G. Huibers, Steven S. Chiang
  • Methods for depositing, releasing and packaging micro-electromechanical devices on wafer substrates
    Publication number: 20030054588
    Abstract: A method for forming a MEMS device is disclosed, where a final release step is performed just prior to a wafer bonding step to protect the MEMS device from contamination, physical contact, or other deleterious external events. Without additional changes to the MEMS structure between release and wafer bonding and singulation, except for an optional stiction treatment, the MEMS device is best protected and overall process flow is improved. The method is applicable to the production of any MEMS device and is particularly beneficial in the making of fragile micromirrors.
    Type: Application
    Filed: December 3, 2001
    Publication date: March 20, 2003
    Applicant: REFLECTIVITY, INC., a California corporation
    Inventors: Satyadev R. Patel, Andrew G. Huibers, Steven S. Chiang