Patents by Inventor Steven Salkow

Steven Salkow has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Integrated electronic hardware for wafer processing control and diagnostic
    Patent number: 6622286
    Abstract: A central controller for use in a semiconductor manufacturing equipment integrates a plurality of controllers with an open architecture allowing real-time communication between the various control loops. The central controller includes at least one central processing unit (CPU) executing high level input output (i/o) and control algorithms and at least one integrated i/o controller providing integrated interface to sensors and control hardware. The integrated i/o controller performs basic i/o and low level control functions and communicates with the CPU through a bus to perform or enable controls of various subsystems of the semiconductor manufacturing equipment.
    Type: Grant
    Filed: June 30, 2000
    Date of Patent: September 16, 2003
    Assignee: Lam Research Corporation
    Inventors: Tuan Ngo, Farro Kaveh, Connie Lam, Chung-Ho Huang, Tuqiang Ni, Anthony T. Le, Steven Salkow