Patents by Inventor Steven T. Murphy

Steven T. Murphy has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for adjusting a multi-substrate probe structure
    Patent number: 7845072
    Abstract: A probe card assembly comprises multiple probe substrates attached to a mounting assembly. Each probe substrate includes a set of probes, and together, the sets of probes on each probe substrate compose an array of probes for contacting a device to be tested. Adjustment mechanisms are configured to impart forces to each probe substrate to move individually each substrate with respect to the mounting assembly. The adjustment mechanisms may translate each probe substrate in an “x,” “y,” and/or “z” direction and may further rotate each probe substrate about any one or more of the forgoing directions. The adjustment mechanisms may further change a shape of one or more of the probe substrates. The probes can thus be aligned and/or planarized with respect to contacts on the device to be tested.
    Type: Grant
    Filed: December 23, 2008
    Date of Patent: December 7, 2010
    Assignee: FormFactor, Inc.
    Inventors: Eric D. Hobbs, Benjamin N. Eldridge, Lunyu Ma, Gaetan L. Mathieu, Steven T. Murphy, Makarand S. Shinde, Alexander H. Slocum
  • METHOD AND APPARATUS FOR ADJUSTING A MULTI-SUBSTRATE PROBE STRUCTURE
    Publication number: 20090158586
    Abstract: A probe card assembly comprises multiple probe substrates attached to a mounting assembly. Each probe substrate includes a set of probes, and together, the sets of probes on each probe substrate compose an array of probes for contacting a device to be tested. Adjustment mechanisms are configured to impart forces to each probe substrate to move individually each substrate with respect to the mounting assembly. The adjustment mechanisms may translate each probe substrate in an “x,” “y,” and/or “z” direction and may further rotate each probe substrate about any one or more of the forgoing directions. The adjustment mechanisms may further change a shape of one or more of the probe substrates. The probes can thus be aligned and/or planarized with respect to contacts on the device to be tested.
    Type: Application
    Filed: December 23, 2008
    Publication date: June 25, 2009
    Inventors: Eric D. Hobbs, Benjamin N. Eldridge, Lunyu Ma, Gaetan L. Mathieu, Steven T. Murphy, Makarand S. Shinde, Alexander H. Slocum
  • Method and apparatus for adjusting a multi-substrate probe structure
    Patent number: 7471094
    Abstract: A probe card assembly comprises multiple probe substrates attached to a mounting assembly. Each probe substrate includes a set of probes, and together, the sets of probes on each probe substrate compose an array of probes for contacting a device to be tested. Adjustment mechanisms are configured to impart forces to each probe substrate to move individually each substrate with respect to the mounting assembly. The adjustment mechanisms may translate each probe substrate in an “x,” “y,” and/or “z” direction and may further rotate each probe substrate about any one or more of the forgoing directions. The adjustment mechanisms may further change a shape of one or more of the probe substrates. The probes can thus be aligned and/or planarized with respect to contacts on the device to be tested.
    Type: Grant
    Filed: June 24, 2005
    Date of Patent: December 30, 2008
    Assignee: FormFactor, Inc.
    Inventors: Eric D. Hobbs, Benjamin N. Eldridge, Lunyu Ma, Gaetan L. Mathieu, Steven T. Murphy, Makarand S. Shinde, Alexander H. Slocum