Abstract: A computer-implemented improved system for producing studio quality e-commerce product videos displaying a 3D rendering created from a 3D model of a product that includes generally the steps of uploading a 3D model of the consumer product onto a computer or an online platform; selecting product features for highlighting in the video; rotating the 3D model to identify selected features; providing text to highlight portions of the video and the selected features; selecting and providing musical accompaniment for the video; and, creating a timeline to establish the sequence of individual portions of the video whereupon the 3D rendered video is then automatically generated for the vendor's e-commerce product page and various social platforms.

Abstract: A lifting apparatus for an industrial processing station, i.e., a lifting table for conveying a body shell during series production of motor vehicles, wherein the lifting apparatus conveys a workpiece on a top frame moved in a purely vertical direction, where the lifting apparatus has, as first vertical guide, at least one isosceles slider-crank mechanism actuated by a motorized drive element, where the isosceles slider-crank mechanism, which consists of a fixed-bearing swing arm with a swing-arm bearing thereof, a control arm with a control-arm guide, a control-arm central joint and a fixed-bearing joint connected to the top frame, is configured to move via actuation of the tie rod acting on the fixed-bearing swing arm, and where particular use of an isosceles slider-crank mechanism, which is also known literature as a “Scott-Russell mechanism”, provides a simple and effective vertical guide system that allows low overall heights with a minimum production outlay.

Abstract: A lifting apparatus for an industrial processing station, i.e., a lifting table for conveying a body shell during series production of motor vehicles, wherein the lifting apparatus conveys a workpiece on a top frame moved in a purely vertical direction, where the lifting apparatus has, as first vertical guide, at least one isosceles slider-crank mechanism actuated by a motorized drive element, where the isosceles slider-crank mechanism, which consists of a fixed-bearing swing arm with a swing-arm bearing thereof, a control arm with a control-arm guide, a control-arm central joint and a fixed-bearing joint connected to the top frame, is configured to move via actuation of the tie rod acting on the fixed-bearing swing arm, and where particular use of an isosceles slider-crank mechanism, which is also known literature as a “Scott-Russell mechanism”, provides a simple and effective vertical guide system that allows low overall heights with a minimum production outlay.

Abstract: A method of plasma doping includes generating a plasma comprising dopant ions proximate to a platen supporting a substrate in a plasma chamber. The platen is biased with a bias voltage waveform having a negative potential that attracts ions in the plasma to the substrate for plasma doping. At least one sensor measuring data related to charging conditions favorable for forming an electrical discharge is monitored. At least one plasma process parameter is modified in response to the measured data, thereby reducing a probability of forming an electrical discharge.

Abstract: A system, method and program product for monitoring the beam angle integrity of an ion beam generated by an ion implanter system are disclosed. The invention utilizes at least one template with each template having a template surface that impedes the motion of an ion. Each template is configured such that an ion impacts the surface of the template if the trajectory of the template deviates from the optimum trajectory by a pre-determined maximum variance angle. The change caused by the impact of the ions with the template and/or a target is then measured to determine the amount of variance in the ion beam. Adjustments can then be made to the ion beam generator to correct for a misaligned beam.

Abstract: A method for fabricating a semiconductor-based device includes providing a substrate including a semiconductor layer, forming a gate dielectric layer on the semiconductor layer, forming a plasma including deuterium, plasma implanting deuterium from the plasma into the substrate, and annealing the substrate to promote passivation of the interface between the dielectric layer and the semiconductor layer.

Abstract: Methods and apparatus for plasma ion implantation with improved dopant profiles are provided. A plasma ion implantation system includes a process chamber, a plasma source to generate a plasma in the process chamber, a platen to hold the substrate in the process chamber and a pulse source to generate implant pulses to accelerate ions from the plasma into the substrate. In one aspect, the pulse source generates implant pulses having pulse widths that are sufficiently long to limit plasma ion implantation during a transient period at the start of each implant pulse to a small fraction of the total implanted dose. In another aspect, ions are generated in a region of the process chamber near a reference potential, such as ground, and are accelerated from the region of plasma generation to the platen. Plasma generation may be enabled after the start of each implant pulse and may be disabled before the end of each implant pulse.

Abstract: A system, method and program product for monitoring the beam angle integrity of an ion beam generated by an ion implanter system are disclosed. The invention utilizes at least one template with each template having a template surface that impedes the motion of an ion. Each template is configured such that an ion impacts the surface of the template if the trajectory of the template deviates from the optimum trajectory by a pre-determined maximum variance angle. The change caused by the impact of the ions with the template and/or a target is then measured to determine the amount of variance in the ion beam. Adjustments can then be made to the ion beam generator to correct for a misaligned beam.

Abstract: A system, method and program product for adjusting metal work function by ion implantation is disclosed. The invention determines the work function of the metal and determines a desired work function threshold for the metal. The desired work function threshold may be a range and is usually based on the work function of the substrate. An ion implanter system is then used to implant ions to at least a portion of the metal. The ion implantation is usually a high-energy ion stream including a material that is calculated to modify the work function of the metal. The ion implanter system continues to transmit the ion stream into the metal until the work function of the metal meets the desired work function threshold.

Abstract: Plasma ion implantation apparatus includes a process chamber, a platen located in the process chamber for supporting a substrate, a dopant source including a solid dopant element and a vaporizer to vaporize dopant material from the solid dopant element, a plasma source to produce a plasma containing ions of the dopant material, and an implant pulse source to apply implant pulses to the platen for accelerating the ions of the dopant material from the plasma into the substrate.

Abstract: A method for fabricating a semiconductor-based device includes disposing a substrate in a process chamber of a process tool, plasma implanting a dopant species from a plasma into a portion of the substrate in the process chamber, and plasma depositing a diffusion barrier on the implanted portion of the substrate prior to removing the at least one substrate from the process tool. The diffusion barrier can be deposited in the same chamber as that used for dopant implantation or a different chamber of the process tool.

Abstract: A plasma ion implantation system includes a process chamber, a source for generating a plasma in the process chamber, a platen for holding a substrate in the process chamber, an implant pulse source configured to generate implant pulses for accelerating ions from the plasma into the substrate, and an axial electrostatic confinement structure configured to confine electrons in a direction generally orthogonal to a surface of the platen. The confinement structure may include an auxiliary electrode spaced from the platen and a bias source configured to bias the auxiliary electrode at a negative potential relative to the plasma.

Abstract: Methods and apparatus for plasma implantation of a workpiece, such as a semiconductor wafer, are provided. A method includes introducing into a plasma doping chamber a dopant gas selected from the group consisting of PF3, AsF3, AsF5 and mixtures thereof, forming in the plasma doping chamber a plasma containing ions of the dopant gas, the plasma having a plasma sheath at or near a surface of the workpiece, and accelerating the dopant gas ions across the plasma sheath toward the workpiece, wherein the dopant gas ions are implanted into the workpiece. The selected dopant gas limits deposition of neutral particles on the workpiece.

Abstract: A method for fabricating a semiconductor-based device includes providing a doped semiconductor substrate, introducing a second dopant into the substrate to define a pn junction, and introducing a neutralizing species into the substrate in the neighborhood of the pn junction to reduce a capacitance associated with the pn junction. A semiconductor-based device includes a semiconductor substrate having first and second dopants, and a neutralizing species. The first and second dopants define a pn junction, and the neutralizing species neutralizes a portion of the first dopant in the neighborhood of the pn junction to decrease a capacitance associated with the pn junction.

Abstract: A method for plasma ion implantation of a substrate includes providing a plasma ion implantation system having a process chamber, a source for producing a plasma in the process chamber, a platen for holding a substrate in the process chamber, an anode spaced from the platen, and a pulse source for generating implant pulses for accelerating ions from the plasma into the substrate. In one aspect, a parameter of an implant process is varied to at least partially compensate for undesired effects of interaction between ions being implanted and the substrate. For example, dose rate, ion energy, or both may be varied during the implant process. In another aspect, a pretreatment step includes accelerating ions from the plasma to the anode to cause emission of secondary electrons from the anode, and accelerating the secondary electrons from the anode to a substrate for pretreatment of the substrate.

Abstract: A method for plasma ion implantation of a substrate includes providing a plasma ion implantation system including a process chamber, a source for producing a plasma in the process chamber, a platen for holding the substrate in the process chamber, and a voltage source for accelerating ions from the plasma into the substrate, depositing on interior surfaces of the process chamber a fresh coating that is similar in composition to a deposited film that results from plasma ion implantation of the substrate, before depositing the fresh coating, cleaning interior surfaces of the process chamber by removing an old film using one or more activated cleaning precursors, plasma ion implantation of the substrate according to a plasma ion implantation process, and repeating the steps of cleaning interior surfaces of the process chamber and depositing a fresh coating following plasma ion implantation of one or more substrates.

Abstract: A Faraday dose and uniformity monitor can include a magnetically suppressed annular Faraday cup surrounding a target wafer. A narrow aperture can reduce discharges within Faraday cup opening. The annular Faraday cup can have a continuous cross section to eliminate discharges due to breaks. A plurality of annular Faraday cups at different radii can independently measure current density to monitor changes in plasma uniformity. The magnetic suppression field can be configured to have a very rapid decrease in field strength with distance to minimize plasma and implant perturbations and can include both radial and azimuthal components, or primarily azimuthal components. The azimuthal field component can be generated by multiple vertically oriented magnets of alternating polarity, or by the use of a magnetic field coil. In addition, dose electronics can provide integration of pulsed current at high voltage, and can convert the integrated charge to a series of light pulses coupled optically to a dose controller.

Abstract: Linear integrated circuit capacitors having greater capacitance per unit area by using lateral flux. One embodiment comprises a two metal layer capacitor wherein each metal layer is comprised of two capacitor conductive components. The capacitor conductive components are cross-coupled so that the total capacitance is the sum of the vertical flux between the metal layers, and the lateral flux along the edges between the two capacitor conductive components in each of the metal layers. The lateral flux between the capacitor conductive components in a single metal layer increases the capacitance per unit area and decreases the bottom-plate parasitic capacitance. Increasing the length of the common edge formed by capacitor conductive components in a metal layer increases the capacitance per unit area. In one lateral flux capacitor, each metal layer is comprised of a plurality of rows, alternate rows are coupled together such that lateral flux is generated between each of the rows.

Abstract: Linear integrated circuit capacitors having greater capacitance per unit area by using lateral flux. One embodiment comprises a two metal layer capacitor wherein each metal layer is comprised of two capacitor conductive components. The capacitor conductive components are cross-coupled so that the total capacitance is the sum of the vertical flux between the metal layers, and the lateral flux along the edges between the two capacitor conductive components in each of the metal layers. The lateral flux between the capacitor conductive components in a single metal layer increases the capacitance per unit area and decreases the bottom-plate parasitic capacitance. Increasing the length of the common edge formed by capacitor conductive components in a metal layer increases the capacitance per unit area. In one lateral flux capacitor, each metal layer is comprised of a plurality of rows, alternate rows are coupled together such that lateral flux is generated between each of the rows.