Patents by Inventor Stewart Bean
Stewart Bean has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11276547Abstract: Disclosed is a charged particle optical apparatus. The charged particle optical apparatus has a liner electrode in a first vacuum zone. The liner electrode is used to generate an electrostatic objective lens field. The apparatus has a second electrode which surrounds at least a section of the primary particle beam path. The section extends in the first vacuum zone and downstream of the liner electrode. A third electrode is provided having a differential pressure aperture through which the particle beam path exits from the first vacuum zone. A particle detector is configured for detecting emitted particles, which are emitted from the object and which pass through the differential pressure aperture of the third electrode. The liner electrode, the second and third electrodes are operable at different potentials relative to each other.Type: GrantFiled: October 23, 2020Date of Patent: March 15, 2022Assignee: Carl Zeiss Microscopy GmbHInventors: Erik Essers, Michael Albiez, Stefan Meyer, Daniel Kirsten, Stewart Bean
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Publication number: 20210050178Abstract: Disclosed is a charged particle optical apparatus. The charged particle optical apparatus has a liner electrode in a first vacuum zone. The liner electrode is used to generate an electrostatic objective lens field. The apparatus has a second electrode which surrounds at least a section of the primary particle beam path. The section extends in the first vacuum zone and downstream of the liner electrode. A third electrode is provided having a differential pressure aperture through which the particle beam path exits from the first vacuum zone. A particle detector is configured for detecting emitted particles, which are emitted from the object and which pass through the differential pressure aperture of the third electrode. The liner electrode, the second and third electrodes are operable at different potentials relative to each other.Type: ApplicationFiled: October 23, 2020Publication date: February 18, 2021Inventors: Erik Essers, Michael Albiez, Stefan Meyer, Daniel Kirsten, Stewart Bean
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Patent number: 10861670Abstract: Disclosed is a charged particle optical apparatus. The charged particle optical apparatus has a liner electrode in a first vacuum zone. The liner electrode is used to generate an electrostatic objective lens field. The apparatus has a second electrode which surrounds at least a section of the primary particle beam path. The section extends in the first vacuum zone and downstream of the liner electrode. A third electrode is provided having a differential pressure aperture through which the particle beam path exits from the first vacuum zone. A particle detector is configured for detecting emitted particles, which are emitted from the object and which pass through the differential pressure aperture of the third electrode. The liner electrode, the second and third electrodes are operable at different potentials relative to each other.Type: GrantFiled: December 23, 2019Date of Patent: December 8, 2020Assignee: Carl Zeiss Microscopy GmbHInventors: Erik Essers, Michael Albiez, Stefan Meyer, Daniel Kirsten, Stewart Bean
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Publication number: 20200135425Abstract: Disclosed is a charged particle optical apparatus. The charged particle optical apparatus has a liner electrode in a first vacuum zone. The liner electrode is used to generate an electrostatic objective lens field. The apparatus has a second electrode which surrounds at least a section of the primary particle beam path. The section extends in the first vacuum zone and downstream of the liner electrode. A third electrode is provided having a differential pressure aperture through which the particle beam path exits from the first vacuum zone. A particle detector is configured for detecting emitted particles, which are emitted from the object and which pass through the differential pressure aperture of the third electrode. The liner electrode, the second and third electrodes are operable at different potentials relative to each other.Type: ApplicationFiled: December 23, 2019Publication date: April 30, 2020Inventors: Erik Essers, Michael Albiez, Stefan Meyer, Daniel Kirsten, Stewart Bean
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Patent number: 10522321Abstract: Disclosed is a charged particle optical apparatus. The charged particle optical apparatus has a liner electrode in a first vacuum zone. The liner electrode is used to generate an electrostatic objective lens field. The apparatus has a second electrode which surrounds at least a section of the primary particle beam path. The section extends in the first vacuum zone and downstream of the liner electrode. A third electrode is provided having a differential pressure aperture through which the particle beam path exits from the first vacuum zone. A particle detector is configured for detecting emitted particles, which are emitted from the object and which pass through the differential pressure aperture of the third electrode. The liner electrode, the second and third electrodes are operable at different potentials relative to each other.Type: GrantFiled: July 27, 2018Date of Patent: December 31, 2019Assignee: Carl Zeiss Microscopy GmbHInventors: Erik Essers, Michael Albiez, Stefan Meyer, Daniel Kirsten, Stewart Bean
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Patent number: 10169847Abstract: An air-to-air background-oriented Schlieren system and method for measuring and rendering visible density changes in air that cause a refractive index change by an airborne vehicle. A sensor aircraft equipped with a high-speed visible spectrum camera travels at low airspeed on a predetermined route and on a level altitude over a background having consistent contrast and sunlight reflectivity. The target aircraft, traveling on the same predetermined route but at an altitude between the sensor aircraft and the ground (background) passes beneath the sensor aircraft. The camera on the sensor aircraft captures a series of images including a reference image immediately before the target aircraft enters the image frame followed by several data images as the target aircraft passes through the image frame. The data images are processed to calculate density gradients around the target aircraft. These density gradients include shockwaves, vortices, engine exhaust, and wakes.Type: GrantFiled: August 5, 2016Date of Patent: January 1, 2019Assignee: The United States of America as Represented by the Administrator of NASAInventors: James Thomas Heineck, Daniel William Banks, Edward Treanor Schairer, Paul Stewart Bean, Edward Andrew Haering, Jr., Brett Arnold Pauer, Brittany Joan Martin, David Nils Larson
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Publication number: 20180342368Abstract: Disclosed is a charged particle optical apparatus. The charged particle optical apparatus has a liner electrode in a first vacuum zone. The liner electrode is used to generate an electrostatic objective lens field. The apparatus has a second electrode which surrounds at least a section of the primary particle beam path. The section extends in the first vacuum zone and downstream of the liner electrode. A third electrode is provided having a differential pressure aperture through which the particle beam path exits from the first vacuum zone. A particle detector is configured for detecting emitted particles, which are emitted from the object and which pass through the differential pressure aperture of the third electrode. The liner electrode, the second and third electrodes are operable at different potentials relative to each other.Type: ApplicationFiled: July 27, 2018Publication date: November 29, 2018Inventors: Erik Essers, Michael Albiez, Stefan Meyer, Daniel Kirsten, Stewart Bean
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Patent number: 10068744Abstract: Disclosed is a charged particle optical apparatus. The charged particle optical apparatus has a liner electrode in a first vacuum zone. The liner electrode is used to generate an electrostatic objective lens field. The apparatus has a second electrode which surrounds at least a section of the primary particle beam path. The section extends in the first vacuum zone and downstream of the liner electrode. A third electrode is provided having a differential pressure aperture through which the particle beam path exits from the first vacuum zone. A particle detector is configured for detecting emitted particles, which are emitted from the object and which pass through the differential pressure aperture of the third electrode. The liner electrode, the second and third electrodes are operable at different potentials relative to each other.Type: GrantFiled: December 1, 2015Date of Patent: September 4, 2018Assignee: Carl Zeiss Microscopy GmbHInventors: Erik Essers, Michael Albiez, Stefan Meyer, Daniel Kirsten, Stewart Bean
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Patent number: 9741528Abstract: Disclosed is a charged particle optical apparatus, which includes a particle optical arrangement, configured to define a particle beam path for inspecting an object. The object is accommodated in a pressure-controlled interior of a specimen chamber during the inspection of the object. The charged particle optical apparatus further includes a differential pressure module having a differential pressure aperture. A positioning arm is arranged in the specimen chamber for selectively position the differential pressure module within the pressure-controlled interior of the specimen chamber into an operating position in which the particle beam path passes through the differential pressure aperture. The selective positioning includes an advancing movement of the differential pressure module toward the primary particle beam path. The advancing movement is transmitted to the differential pressure module by a track-guided movement of the positioning arm.Type: GrantFiled: May 28, 2015Date of Patent: August 22, 2017Assignee: CARL ZEISS MICROSCOPY GMBHInventors: Michael Albiez, Stefan Meyer, Daniel Kirsten, Stewart Bean, Erik Essers
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Publication number: 20170154752Abstract: Disclosed is a charged particle optical apparatus. The charged particle optical apparatus has a liner electrode in a first vacuum zone. The liner electrode is used to generate an electrostatic objective lens field. The apparatus has a second electrode which surrounds at least a section of the primary particle beam path. The section extends in the first vacuum zone and downstream of the liner electrode. A third electrode is provided having a differential pressure aperture through which the particle beam path exits from the first vacuum zone. A particle detector is configured for detecting emitted particles, which are emitted from the object and which pass through the differential pressure aperture of the third electrode. The liner electrode, the second and third electrodes are operable at different potentials relative to each other.Type: ApplicationFiled: December 1, 2015Publication date: June 1, 2017Inventors: Erik Essers, Michael Albiez, Stefan Meyer, Daniel Kirsten, Stewart Bean
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Publication number: 20150348742Abstract: Disclosed is a charged particle optical apparatus, which includes a particle optical arrangement, configured to define a particle beam path for inspecting an object. The object is accommodated in a pressure-controlled interior of a specimen chamber during the inspection of the object. The charged particle optical apparatus further includes a differential pressure module having a differential pressure aperture. A positioning arm is arranged in the specimen chamber for selectively position the differential pressure module within the pressure-controlled interior of the specimen chamber into an operating position in which the particle beam path passes through the differential pressure aperture. The selective positioning includes an advancing movement of the differential pressure module toward the primary particle beam path. The advancing movement is transmitted to the differential pressure module by a track-guided movement of the positioning arm.Type: ApplicationFiled: May 28, 2015Publication date: December 3, 2015Inventors: Michael Albiez, Stefan Meyer, Daniel Kirsten, Stewart Bean
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Patent number: 9159532Abstract: The invention refers to a method and a charged particle beam device for analyzing an object using a charged particle beam interacting with the object. The object comprises a sample embedded in a resin. Interaction radiation in the form of cathodoluminescence light is detected for identifying areas in which the resin is arranged and in which the sample is arranged. Interaction particles are detected to identify particles within the resin and the sample for further analysis by using EDX analysis.Type: GrantFiled: January 8, 2014Date of Patent: October 13, 2015Assignee: Carl Zeiss Microscopy Ltd.Inventors: Edward Hill, Stewart Bean
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Publication number: 20140197310Abstract: The invention refers to a method and a charged particle beam device for analyzing an object using a charged particle beam interacting with the object. The object comprises a sample embedded in a resin. Interaction radiation in the form of cathodoluminescence light is detected for identifying areas in which the resin is arranged and in which the sample is arranged. Interaction particles are detected to identify particles within the resin and the sample for further analysis by using EDX analysis.Type: ApplicationFiled: January 8, 2014Publication date: July 17, 2014Inventors: Edward Hill, Stewart Bean
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Patent number: 8648301Abstract: A system includes a particle optical system and a photosensitive detector. The particle optical system includes a charged particle beam source and an objective lens. The charged particle beam source is configured to generate a charged particle beam that travels along a particle beam path, and the objective lens is configured to focus the particle beam onto an object plane of the particle optical system. The system is configured such that a light beam path of the system extends from the object plane to the photosensitive detector.Type: GrantFiled: September 20, 2012Date of Patent: February 11, 2014Assignee: Carl Zeiss Microscopy Ltd.Inventors: Stewart Bean, Michael Robert Astley
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Patent number: 8426812Abstract: A method of operating a charged-particle microscope, the method comprising: recording a first image of a first region of an object in a first setting; recording a second image of a second region of the object using the charged-particle microscope in a second setting; reading a third image of a third region using the charged-particle microscope, wherein the first and second regions are contained at least partially within the third region; displaying a representation of the first image at least partly within the displayed third image, wherein the representation of the first image includes a first indicator which is indicative of the first setting; displaying a representation of the second image at least partly within the displayed third image, wherein the representation of the second image includes a second indicator which is indicative of the second setting, and wherein the displayed second indicator is different from the displayed first indicator.Type: GrantFiled: November 2, 2011Date of Patent: April 23, 2013Assignee: Carl Zeiss Microscopy Ltd.Inventors: Stewart Bean, Roger Rowland, Simon Hees
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Publication number: 20120104250Abstract: A method of operating a charged-particle microscope, the method comprising: recording a first image of a first region of an object in a first setting; recording a second image of a second region of the object using the charged-particle microscope in a second setting; reading a third image of a third region using the charged-particle microscope, wherein the first and second regions are contained at least partially within the third region; displaying a representation of the first image at least partly within the displayed third image, wherein the representation of the first image includes a first indicator which is indicative of the first setting; displaying a representation of the second image at least partly within the displayed third image, wherein the representation of the second image includes a second indicator which is indicative of the second setting, and wherein the displayed second indicator is different from the displayed first indicator.Type: ApplicationFiled: November 2, 2011Publication date: May 3, 2012Applicant: CARL ZEISS NTS LTD.Inventors: Stewart Bean, Roger Rowland, Simon Hees