Patents by Inventor Stone Chen

Stone Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • MONOLITHIC PLATEN
    Publication number: 20190143478
    Abstract: In an embodiment, a chemical mechanical planarization (CMP) system includes: a monolithic platen within a platen housing, wherein the monolithic platen is formed of a single piece of material, wherein the monolithic platen includes: a first portion within a first opening, and a second portion within a second opening, wherein the first portion has a different diameter than the second portion; and a polishing fluid delivery module above the monolithic platen, wherein the polishing fluid delivery module is configured to deliver slurry to the monolithic platen during performance of CMP.
    Type: Application
    Filed: April 27, 2018
    Publication date: May 16, 2019
    Inventors: Chou-Zon LIA, Kit Chen, Stone Chen, Sheng-Tai Peng
  • PLATEN STOPPER
    Publication number: 20190061094
    Abstract: A stopper includes a head portion sized and configured to be coupled to an upper platen of a chemical-mechanical planarization system and a stopper leg sized and configured to direct a flow of liquid slurry applied to an upper planar surface of the upper platen substantially away from a lower surface of the upper platen.
    Type: Application
    Filed: January 29, 2018
    Publication date: February 28, 2019
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Kanyu Han, Juster Huang, Fang-Chi Chien, Stone Chen, Sheng-Tai Peng