Patents by Inventor Strellson Cheng

Strellson Cheng has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Calibration method for magnetically enhanced reactive ion etcher
    Patent number: 6545468
    Abstract: A method of calibrating the magnetic coils of a magnetically enhanced reactive ion etcher includes taking magnetic field measurements outside of a closed plasma chamber and correlating such measurements to the magnetic field within the chamber. One or more factors are established which when applied to measurements taken externally yield results representative of measurements taken internally.
    Type: Grant
    Filed: August 2, 2001
    Date of Patent: April 8, 2003
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd
    Inventors: Hui Ming Kuo, Strellson Cheng
  • CALIBRATION METHOD FOR MAGNETICALLY ENHANCED REACTIVE ION ETCHER
    Publication number: 20030034773
    Abstract: A method of calibrating the magnetic coils of a magnetically enhanced reactive ion etcher includes taking magnetic field measurements outside of a closed plasma chamber and correlating such measurements to the magnetic field within the chamber. One or more factors are established which when applied to measurements taken externally yield results representative of measurements taken internally.
    Type: Application
    Filed: August 2, 2001
    Publication date: February 20, 2003
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Hui Ming Kuo, Strellson Cheng