Abstract: The present invention comprises a chemical mechanical polishing tool comprising a polishing platen and a removable, replaceable platen top mounted on a top surface of the platen. Preferably, the platen top comprises a material substantially impervious to the slurries used when planarizing an object. Most preferably, the platen top comprises aluminum alloy or glass. The platen top may be tailored to provide enhanced polishing conditions by acting as an insulator, a conductor or machined to be concave or convex. The invention may further include endpoint sensors attached to the platen top.

Abstract: The present invention is intended for use on BiCMOS technology where the BJTs are formed after the FETs. A thin FET protection layer 26 is deposited on the raised and recessed regions 28 of the semiconductor substrate 10. A selectively removable filler layer 30 is then deposited on the FET protection layer 26 with a thickness to over-fill the recessed regions 28 of the gates 24 of the FETs. The selectively removable filler layer 30 is then planarized until the FET protection layer 26 on top of the gates 24 is exposed. The recessed regions 28 between the gates 24 are left substantially filled with selectively removable filler layer 30. The selectively removable filler layer 30 in the region where the BJT is formed is patterned and an opening 32 is made to allow for the depositing of layers of different materials 34, 36, 38, 40, 42, 44 used in the construction of the BJT. The layer of different materials 34, 36, 38, 40, 42, 44 are processed by methods known in the art to form polysilicon emitter 46 of the BJT.

Abstract: The present invention comprises a chemical mechanical polishing tool comprising a polishing platen and a removable, replaceable platen top mounted on a top surface of the platen. Preferably, the platen top comprises a material substantially impervious to the slurries used when planarizing an object. Most preferably, the platen top comprises aluminum alloy or glass. The platen top may be tailored to provide enhanced polishing conditions by acting as an insulator, a conductor or machined to be concave or convex. The invention may further include endpoint sensors attached to the platen top.

Abstract: In a chemical mechanical polishing process for planarization of semiconductor wafers, a pair of opposed grippers are used to move the wafer from one station to another. During this movement, the wafer is rotated and brushes along the periphery are placed in contact with the edge of the wafer to remove foreign material and residue which builds up along the edge of the wafer. Cleaning fluid may be introduced to flush away and/or breakup the residue buildup.