Abstract: Shipping containers for covers or baseplates of reticle pods include a first shell including first fixing features and a second shell including second fixing features. When the first shell and the second shell are joined, the shells define an internal space capable of accommodating a cover or a baseplate of a reticle pod, and the fixing features engage the cover or baseplate to prevent movement of the cover or baseplate in directions in plane with the first or second shells. The fixing features can be such that there are both rigid and elastic fixing features contacting the cover or baseplate. A method of storing a cover or baseplate can include placing the cover or baseplate between first and second shells and joining the first and second shells to one another.

Abstract: A reconfigurable filter for a digitally controlled phase shifter has an input port, an output port, and a selectively activatable filter circuit connected to a junction between the input port and the output port. The filter circuit has a first passive element and a second passive element that is selectively and exclusively shunted by activating and deactivating respective active devices to which the first passive element and the second passive element are connected. A high pass characteristic for phase advance or a low pass characteristic for phase delay may be defined.