Patents by Inventor Stuart J. McNaught

Stuart J. McNaught has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Laser-produced plasma EUV light source with isolated plasma
    Patent number: 6933515
    Abstract: An EUV radiation source (40) that includes a nozzle (42) positioned a far enough distance away from a target region (50) so that EUV radiation (56) generated at the target region (50) by a laser beam (54) impinging a target stream (46) emitted from the nozzle (42) is not significantly absorbed by target vapor proximate the nozzle (42). Also, the EUV radiation (56) does not significantly erode the nozzle (42) and contaminate source optics (34). In one embodiment, the nozzle (42) is more than 10 cm away from the target region (50).
    Type: Grant
    Filed: June 26, 2003
    Date of Patent: August 23, 2005
    Assignee: University of Central Florida Research Foundation
    Inventors: Jeffrey S. Hartlove, Mark E. Michaelian, Henry Shields, Steven W. Fornaca, Stuart J. McNaught, Fernando Martos, Richard H. Moyer