Abstract: In a method of constructing a head shield for a radiation machine, the angular distribution of radiation propagating from a source and the angular function of thickness of a material in attenuating the radiation to a certain level of its original value are determined. Based on the angular distribution of radiation from the source and the angular function of thickness of the material, the thicknesses of the material at a plurality of angular locations around the source and distances from the source can be calculated for attenuating the radiation to or less than a predetermined threshold value. A shield around the source is constructed based on the calculated thicknesses of the material through iterative steps to ensure a cost-saving, weight-efficient, optimal solution.

Abstract: In a method of constructing a head shield for a radiation machine, the angular distribution of radiation propagating from a source and the angular function of thickness of a material in attenuating the radiation to a certain level of its original value are determined. Based on the angular distribution of radiation from the source and the angular function of thickness of the material, the thicknesses of the material at a plurality of angular locations around the source and distances from the source can be calculated for attenuating the radiation to or less than a predetermined threshold value. A shield around the source is constructed based on the calculated thicknesses of the material through iterative steps to ensure a cost-saving, weight-efficient, optimal solution.

Abstract: In a method of constructing a head shield for a radiation machine, the angular distribution of radiation propagating from a source and the angular function of thickness of a material in attenuating the radiation to a certain level of its original value are determined. Based on the angular distribution of radiation from the source and the angular function of thickness of the material, the thicknesses of the material at a plurality of angular locations around the source and distances from the source can be calculated for attenuating the radiation to or less than a predetermined threshold value. A shield around the source is constructed based on the calculated thicknesses of the material through iterative steps to ensure a cost-saving, weight-efficient, optimal solution.

Abstract: A radiation apparatus includes a source operable to generate a radiation beam, a multileaf collimator operable to shape of the radiation beam, and a pivoting mechanism configured to pivot the multileaf collimator about the source. The radiation apparatus may further include a rotating mechanism configured to rotate the multileaf collimator about an axis passing through the source and the multileaf collimator.

Abstract: A radiation apparatus includes a source operable to generate a radiation beam, a multileaf collimator operable to shape of the radiation beam, and a pivoting mechanism configured to pivot the multileaf collimator about the source. The radiation apparatus may further include a rotating mechanism configured to rotate the multileaf collimator about an axis passing through the source and the multileaf collimator.

Abstract: Disclosed is a substrate processing system with a magnetic conduit configuration to improve the movement of a substrate carrier within the system. The configuration specifically provides for safe, secure movement of a carrier between multiple levels of a substrate processing system by using magnetic conduits to redirect magnetic forces created by a linear motor, permitting the linear motor to be positioned outside of the system and in a location that will not interfere with the movement of the carrier.

Abstract: In a method of constructing a head shield for a radiation machine, the angular distribution of radiation propagating from a source and the angular function of thickness of a material in attenuating the radiation to a certain level of its original value are determined. Based on the angular distribution of radiation from the source and the angular function of thickness of the material, the thicknesses of the material at a plurality of angular locations around the source and distances from the source can be calculated for attenuating the radiation to or less than a predetermined threshold value. A shield around the source is constructed based on the calculated thicknesses of the material through iterative steps to ensure a cost- saving, weight-efficient, optimal solution.

Abstract: Introduction of substrates into vacuum environment is accomplish by gradually reducing the number of substrates being transferred simultaneously as the clean and evacuated environment is progressed. Cassettes are maintained in clean atmospheric environment and do not enter the vacuum environment. Several vacuum locks are linearly staggered so as to introduce progressively higher level of vacuum environment. The number of substrates transported through this arrangement is a portion of the number of substrates present in each cassette. The staggered vacuum locks lead to a series of processing chambers, wherein a yet smaller number of substrates, e.g., one or two, are transported.

Abstract: Disclosed is a substrate processing system with a magnetic conduit configuration to improve the movement of a substrate carrier within the system. The configuration specifically provides for safe, secure movement of a carrier between multiple levels of a substrate processing system by using magnetic conduits to redirect magnetic forces created by a linear motor, permitting the linear motor to be positioned outside of the system and in a location that will not interfere with the movement of the carrier.

Abstract: Disclosed is a substrate processing system with a magnetic conduit configuration to improve the movement of a substrate carrier within the system. The configuration specifically provides for safe, secure movement of a carrier between multiple levels of a substrate processing system by using magnetic conduits to redirect magnetic forces created by a linear motor, permitting the linear motor to be positioned outside of the system and in a location that will not interfere with the movement of the carrier.

Abstract: Devices and methods for mounting and aligning transport rails to a processing chamber of a substrate processing system are described. An alignment feature is built-in to the transport rail and a corresponding alignment feature is added to the valves separating processing chambers. The alignment feature may be a pin-groove arrangement.

Abstract: There is described a wafer processing system for thinned wafers that are easily broken during handling. The system protects against breakage during handling and provides for temperature controls during processing.

Abstract: There is described a wafer processing system for thinned wafers that are easily broken during handling. The system protects against breakage during handling and provides for temperature controls during processing.

Abstract: There is described a wafer processing system for thinned wafers that are easily broken during handling. The system protects against breakage during handling and provides for temperature controls during processing.

Abstract: Introduction of substrates into vacuum environment is accomplish by gradually reducing the number of substrates being transferred simultaneously as the clean and evacuated environment is progressed. Cassettes are maintained in clean atmospheric environment and do not enter the vacuum environment. Several vacuum locks are linearly staggered so as to introduce progressively higher level of vacuum environment. The number of substrates transported through this arrangement is a portion of the number of substrates present in each cassette. The staggered vacuum locks lead to a series of processing chambers, wherein a yet smaller number of substrates, e.g., one or two, are transported.

Abstract: Devices and methods for mounting and aligning transport rails to a processing chamber of a substrate processing system are described. An alignment feature is built-in to the transport rail and a corresponding alignment feature is added to the valves separating processing chambers. The alignment feature may be a pin-groove arrangement.

Abstract: There is described a wafer processing system for thinned wafers that are easily broken during handling. The system protects against breakage during handling and provides for temperature controls during processing.

Abstract: There is described a wafer processing system for thinned wafers that are easily broken during handling. The system protects against breakage during handling and provides for temperature controls during processing.

Abstract: Disclosed is a substrate processing system with a magnetic conduit configuration to improve the movement of a substrate carrier within the system. The configuration specifically provides for safe, secure movement of a carrier between multiple levels of a substrate processing system by using magnetic conduits to redirect magnetic forces created by a linear motor, permitting the linear motor to be positioned outside of the system and in a location that will not interfere with the movement of the carrier.

Abstract: A valve assembly and method of actuating a valve blade in a processing chamber through the use of magnetic force coupling is disclosed. The valve assembly comprises a valve rod for imparting a reciprocal motion to a valve blade which opens and closes a valve, the valve rod having at least one magnet mounted thereupon. A housing seals the valve rod and valve blade from the ambient, and an actuator rod in the ambient, having at least one complementary magnet mounted thereupon, aligns with the magnet on the valve rod to form a magnetic coupling through the housing. An actuator mechanism then provides a reciprocal motion to the actuator rod, which transfers the motion through the magnetic coupling to the valve rod and valve blade. Multiple actuator mechanisms can also be employed to vary the force applied to the valve blade to further increase the life of the valve assembly while still providing a strong seal between processing chambers.