Abstract: A closed loop motion control system employing at least one relaxor actuator which controls the position of a moving member having mass by controlling an electric field applied to the relaxor actuator. The actuator comprises a body of relaxor material dimensionally variable under the influence of the electric field applied in the form of a voltage to electrodes on at least two surfaces of the actuator. The voltage is applied in response to a feedback signal produced by at least one feedback sensor, which may be a displacement sensor or some other type of sensor. Thus, by constantly monitoring the displacement or other variable of the actuator device, the position of the moving member may be precisely controlled.

Abstract: A closed loop motion control system employing at least one relaxor actuator which controls the position of a moving member having mass by controlling an electric field applied to the relaxor actuator. The actuator comprises a body of relaxor material dimensionally variable under the influence of the electric field applied in the form of a voltage to electrodes on at least two surfaces of the actuator. The voltage is applied in response to a feedback signal produced by at least one feedback sensor, which may be a displacement sensor or some other type of sensor. Thus, by constantly monitoring the displacement or other variable of the actuator device, the position of the moving member may be precisely controlled.

Abstract: A giant magnetoresistive (GMR) based eddy current sensor including a giant magnetoresistive sensor integrated on a silicon chip with a signal conditioning circuit and a circular coil.

Abstract: A plain bearing slide system has a carriage mounted on a slide by use of bearing pads. Each bearing pad is coated with a layer of polymeric material having a convex surface, and is arranged to ride on a counterface. The combined thickness of the layer and a layer providing the counterface is such that the difference between the static and dynamic coefficients of friction is substantially less than the difference associated with the material when used in bulk bearings. A slide system using PTFE, and with a combined thickness of the layers of 2 to 3 micrometers, operated as a measuring instrument under ambient conditions such that the PTFE is substantially non-eroding, has proved capable of providing measurements to an accuracy of 0.05 nanometers.