Patents by Inventor Stuart Tison
Stuart Tison has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 10545087Abstract: Embodiments as disclosed herein may provide a sensor system including a container, such as a bag, having a port assembly integrated therewith. The port assembly includes an optically transparent window and be configured such that a sensor may be mechanically attached to the port assembly to interface with the optical window. The sensor may include an index of refraction (IoR) sensor that measures the chemical concentration of a liquid inside the container based on a refractive index.Type: GrantFiled: March 17, 2015Date of Patent: January 28, 2020Assignee: ENTEGRIS, INC.Inventors: Francisco Machuca, Ronald P. Chiarello, Stuart A. Tison
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Publication number: 20170108427Abstract: Embodiments as disclosed herein may provide a sensor system including a container, such as a bag, having a port assembly integrated therewith. The port assembly includes an optically transparent window and be configured such that a sensor may be mechanically attached to the port assembly to interface with the optical window. The sensor may include an index of refraction (IoR) sensor that measures the chemical concentration of a liquid inside the container based on a refractive index.Type: ApplicationFiled: March 17, 2015Publication date: April 20, 2017Inventors: Francisco Machuca, Ronald P. Chiarello, Stuart A. Tison
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Patent number: 7680399Abstract: Systems and methods for producing and delivering vapor are disclosed. A vaporizer tank containing a liquid may be heated such that liquid within the tank is heated and vapor generated. The flow of this vapor to a destination may then be regulated. Embodiments of the present invention may control the temperature of this liquid such that a saturated vapor condition is substantially maintained in the vaporizer tank. The vaporizer tank is coupled to a mass flow controller which regulates the delivery of the vapor to downstream components. By substantially maintaining the saturated vapor condition within the vaporizer tank the pressure of vapor at the mass flow controller can be substantially maintained and a stable and consistent flow rate of vapor achieved.Type: GrantFiled: February 7, 2006Date of Patent: March 16, 2010Assignee: Brooks Instrument, LLCInventors: Daryl Buchanan, Faisal Tariq, Hai Mei, Stuart Tison
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Patent number: 7424895Abstract: Systems and methods for flow verification and validation of mass flow controllers are disclosed. A mass flow controller may be commanded to a specified flow and flow measurement commenced. During an interval, gas is accumulated in a first volume and measurements taken within this volume. The various measurements taken during the interval may then be used to calculate the flow rate. The flow rate, in turn, may be used to determine the accuracy of the mass flow controller relative to a setpoint.Type: GrantFiled: September 21, 2004Date of Patent: September 16, 2008Assignee: Celerity, Inc.Inventors: Stuart A. Tison, Sandeep Sukumaran, James Barker
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Patent number: 7412986Abstract: Systems and methods for flow verification and validation of mass flow controllers are disclosed. A mass flow controller may be commanded to a specified flow and flow measurement commenced. Gas is accumulated in a first volume and while measurements are taken within this volume. Gas may then flow into a second volume while measurements are taken. The various measurements taken during the two intervals may then be used to calculate the flow rate. The flow rate, in turn, may be used to determine the accuracy of the mass flow controller relative to a setpoint. Additionally, these systems and methods may utilize only one volume to perform flow verification by flowing gas into this volume, taking measurements, and calculating the flow rate based only upon this set of measurements.Type: GrantFiled: July 9, 2004Date of Patent: August 19, 2008Assignee: Celerity, Inc.Inventors: Stuart A. Tison, Sandeep Sukumaran, James Barker
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Publication number: 20080097657Abstract: Systems and methods for controlling the temperature of a wafer are disclosed. These systems and methods may employ a back side wafer pressure control system (BSWPC) that includes subsystems and a controller operable in tandem to control the temperature of wafers in one or more process chambers. The subsystems may include mechanical components for controlling a flow of gas to the backside of a wafer while the controller may be utilized to control these mechanical components in order to control wafer temperature in a process chamber. Furthermore, embodiments of these systems and methods may also use a chiller in combination with the controller to provide both coarse and fine temperature control.Type: ApplicationFiled: October 13, 2005Publication date: April 24, 2008Applicant: Celerity, Inc.Inventors: Kenneth Tinsley, Stuart Tison
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Patent number: 7363182Abstract: Systems and methods for correcting measurements of fluid flow using device-specific information to compensate for differences between individual devices of the same design. In one embodiment, a method includes providing device-specific calibration data; sensing a fluid flow; computing a measured fluid flow based on the sensed fluid flow, and correcting the measured fluid flow based on the device-specific calibration data. More particularly, the fluid flow measurement is corrected using correction factors that compensate for the use of a gas that is different from the calibration gas (CF0 (1+aF+bF2+cF3)), for device variations in sensor sensitivity (1+??R), and for variations in the split flow of fluid through the flow meter (1???ADC(Sp/100)2). The sensor and split flow correction factors may be used independently of each other in some embodiments.Type: GrantFiled: May 13, 2005Date of Patent: April 22, 2008Assignee: Celerity, Inc.Inventors: Stuart A. Tison, Shiliang Lu
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Patent number: 7287434Abstract: One embodiment of the present invention can comprise a primary flow measurement system, a secondary flow measurement system in fluid communication with the primary flow measurement system and a control coupled to the primary flow measurement system and the secondary flow measurement system. The controller can comprise a processor and a memory accessible by the processor. The processor can execute computer instructions stored on the memory to calculate a flow rate using the primary flow measurement system, in a first mode of operation, and calculate the flow rate using the secondary flow measurement system, in a second mode of operation. The computer instructions can be further executable to switch between the first mode of operation and the second mode of operation based on a predefined parameter.Type: GrantFiled: January 27, 2006Date of Patent: October 30, 2007Assignee: Celerity, Inc.Inventors: Stuart A. Tison, Shiliang Lu
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Publication number: 20070181703Abstract: Systems and methods for producing and delivering vapor are disclosed. A vaporizer tank containing a liquid may be heated such that liquid within the tank is heated and vapor generated. The flow of this vapor to a destination may then be regulated. Embodiments of the present invention may control the temperature of this liquid such that a saturated vapor condition is substantially maintained in the vaporizer tank. The vaporizer tank is coupled to a mass flow controller which regulates the delivery of the vapor to downstream components. By substantially maintaining the saturated vapor condition within the vaporizer tank the pressure of vapor at the mass flow controller can be substantially maintained and a stable and consistent flow rate of vapor achieved.Type: ApplicationFiled: February 7, 2006Publication date: August 9, 2007Inventors: Daryl Buchanan, Faisal Tariq, Hai Mei, Stuart Tison
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Patent number: 7243035Abstract: Systems and methods for correcting measurements of fluid flow using device-specific information to compensate for differences between individual devices of the same design. In one embodiment, a method includes providing device-specific calibration data; sensing a fluid flow; computing a measured fluid flow based on the sensed fluid flow, and correcting the measured fluid flow based on the device-specific calibration data. More particularly, the fluid flow measurement is corrected using correction factors that compensate for the use of a gas that is different from the calibration gas (CF0(1+aF+bF2+cF3)), for device variations in sensor sensitivity (1+??R), and for variations in the split flow of fluid through the flow meter (1???ADC(Sp/100)2). The sensor and split flow correction factors may be used independently of each other in some embodiments.Type: GrantFiled: May 23, 2003Date of Patent: July 10, 2007Assignee: Celerity, Inc.Inventors: Stuart A. Tison, Shiliang Lu
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Patent number: 7150201Abstract: One embodiment of the present invention can comprise a primary flow measurement system, a secondary flow measurement system in fluid communication with the primary flow measurement system and a control coupled to the primary flow measurement system and the secondary flow measurement system. The controller can comprise a processor and a memory accessible by the processor. The processor can execute computer instructions stored on the memory to calculate a flow rate using the primary flow measurement system, in a first mode of operation, and calculate the flow rate using the secondary flow measurement system, in a second mode of operation. The computer instructions can be further executable to switch between the first mode of operation and the second mode of operation based on a predefined parameter.Type: GrantFiled: December 15, 2004Date of Patent: December 19, 2006Assignee: Celerity, Inc.Inventors: Stuart A. Tison, Shiliang Lu
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Patent number: 7124647Abstract: A flow restrictor (30) for a mass flow metering device formed of a solid material and slots (32) originating from an outer surface towards inward.Type: GrantFiled: May 23, 2003Date of Patent: October 24, 2006Assignee: Celerity, Inc.Inventors: Stuart A. Tison, Guanghua Wu, Tracy Gill, Vincent Lopez
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Publication number: 20060123921Abstract: One embodiment of the present invention can comprise a primary flow measurement system, a secondary flow measurement system in fluid communication with the primary flow measurement system and a control coupled to the primary flow measurement system and the secondary flow measurement system. The controller can comprise a processor and a memory accessible by the processor. The processor can execute computer instructions stored on the memory to calculate a flow rate using the primary flow measurement system, in a first mode of operation, and calculate the flow rate using the secondary flow measurement system, in a second mode of operation. The computer instructions can be further executable to switch between the first mode of operation and the second mode of operation based on a predefined parameter.Type: ApplicationFiled: January 27, 2006Publication date: June 15, 2006Inventors: Stuart Tison, Shiliang Lu
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Publication number: 20060123920Abstract: One embodiment of the present invention can comprise a primary flow measurement system, a secondary flow measurement system in fluid communication with the primary flow measurement system and a control coupled to the primary flow measurement system and the secondary flow measurement system. The controller can comprise a processor and a memory accessible by the processor. The processor can execute computer instructions stored on the memory to calculate a flow rate using the primary flow measurement system, in a first mode of operation, and calculate the flow rate using the secondary flow measurement system, in a second mode of operation. The computer instructions can be further executable to switch between the first mode of operation and the second mode of operation based on a predefined parameter.Type: ApplicationFiled: December 15, 2004Publication date: June 15, 2006Inventors: Stuart Tison, Shiliang Lu
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Publication number: 20060011237Abstract: Systems and methods for flow verification and validation of mass flow controllers are disclosed. A mass flow controller may be commanded to a specified flow and flow measurement commenced. During an interval, gas is accumulated in a first volume and measurements taken within this volume. The various measurements taken during the interval may then be used to calculate the flow rate. The flow rate, in turn, may be used to determine the accuracy of the mass flow controller relative to a setpoint.Type: ApplicationFiled: September 21, 2004Publication date: January 19, 2006Inventors: Stuart Tison, Sandeep Sukumaran, James Barker
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Publication number: 20060005882Abstract: Systems and methods for flow verification and validation of mass flow controllers are disclosed. A mass flow controller may be commanded to a specified flow and flow measurement commenced. Gas is accumulated in a first volume and while measurements are taken within this volume. Gas may then flow into a second volume while measurements are taken. The various measurements taken during the two intervals may then be used to calculate the flow rate. The flow rate, in turn, may be used to determine the accuracy of the mass flow controller relative to a setpoint. Additionally, these systems and methods may utilize only one volume to perform flow verification by flowing gas into this volume, taking measurements, and calculating the flow rate based only upon this set of measurements.Type: ApplicationFiled: July 9, 2004Publication date: January 12, 2006Inventors: Stuart Tison, Sandeep Sukumaran, James Barker
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Publication number: 20050241412Abstract: A flow restrictor (30) for a mass flow metering device formed of a solid material and slots (32) originating from an outer surface towards inward.Type: ApplicationFiled: May 23, 2003Publication date: November 3, 2005Inventors: Stuart Tison, Guanghua Wu, Tracy Gill, Vincent Lopez
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Publication number: 20050205774Abstract: Systems and methods for correcting measurements of fluid flow using device- specific information to compensate for differences between individual devices of the same design. In one embodiment, a method comprises providing device-specific calibration data; sensing a fluid flow; computing a measured fluid flow based on the sensed fluid flow, and correcting the measured fluid flow based on the device-specific calibration data. More particularly, the fluid flow measurement is corrected using correction factors that compensate for the use of a gas that is different from the calibration gas (CF0 (1+aF+bF2+cF3)), for device variations in sensor sensitivity (1+??R), and for variations in the split flow of fluid through the flow meter (1???ADC(Sp/100)2). The sensor and split flow correction factors may be used independently of each other in some embodiments.Type: ApplicationFiled: May 13, 2005Publication date: September 22, 2005Inventors: Stuart Tison, Shiliang Lu
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Publication number: 20040030522Abstract: Systems and methods for correcting measurements of fluid flow using device-specific information to compensate for differences between individual devices of the same design. In one embodiment, a method comprises providing device-specific calibration data; sensing a fluid flow; computing a measured fluid flow based on the sensed fluid flow, and correcting the measured fluid flow based on the device-specific calibration data. More particularly, the fluid flow measurement is corrected using correction factors that compensate for the use of a gas that is different from the calibration gas (CF0(1+aF+bF2+cF3)), for device variations in sensor sensitivity (1+&agr;&Dgr;R), and for variations in the split flow of fluid through the flow meter (1-&bgr;&Dgr;ADC(Sp/100)2). The sensor and split flow correction factors may be used independently of each other in some embodiments.Type: ApplicationFiled: May 23, 2003Publication date: February 12, 2004Inventors: Stuart A. Tison, Shiliang Lu