Abstract: A thin film battery manufacturing method comprises annealing a battery substrate to a temperature at which organic materials are burned off the battery substrate to clean the battery substrate. The battery substrate comprises a thickness of less than about 100 microns. After annealing, a plurality of thin films are formed on the annealed battery substrate, the thin films comprising at least one electrolyte between a pair of electrodes, and the thin films adapted to generate or store an electrical charge. The thin films can also be annealed to remove defects in the thin films.

Abstract: A thin film battery manufacturing method comprises annealing a battery substrate to a temperature at which organic materials are burned off the battery substrate to clean the battery substrate. The battery substrate comprises a thickness of less than about 100 microns. After annealing, a plurality of thin films are formed on the annealed battery substrate, the thin films comprising at least one electrolyte between a pair of electrodes, and the thin films adapted to generate or store an electrical charge. The thin films can also be annealed to remove defects in the thin films.

Abstract: A thin film battery comprises a substrate with a front side and a back side. A first battery cell is provided on the front side of the substrate, the first battery cell including an electrolyte between a pair of electrodes. A second battery cell is provided on the back side of the substrate, the second battery cell also including an electrolyte between a pair of electrodes. The battery is capable of providing an energy density of more than 700 wh/l and a specific energy of more than 250 wh/kg. A method of annealing a deposited thin film is also described.

Abstract: In a method of manufacturing a thin film battery in a chamber, a target comprising LiCoO2 is provided on a magnetron cathode in the chamber, and a substrate is placed facing the target. A process gas is introduced into the chamber and the process gas is energized to form a plasma to sputter the target to deposit LiCoO2 on the substrate. An ion flux of from about 0.1 to about 5 mA/cm2 is delivered from the plasma to the substrate to enhance the crystallinity of the deposited LiCoO2 material on the substrate. The process gas is exhausted from the chamber. The target can also be made of other materials.

Abstract: A thin film battery comprises a substrate with a front side and a back side. A first battery cell is provided on the front side of the substrate, the first battery cell including an electrolyte between a pair of electrodes. A second battery cell is provided on the back side of the substrate, the second battery cell also including an electrolyte between a pair of electrodes. The battery is capable of providing an energy density of more than 700 wh/l and a specific energy of more than 250 wh/kg. A method of annealing a deposited thin film is also described.

Abstract: A method of depositing lithium phosphorus oxynitride on a substrate, the method comprising loading a substrate into a vacuum chamber having a target comprising lithium phosphate, introducing a process gas comprising nitrogen into the chamber and maintaining the gas at a pressure of less than about 15 mTorr; and forming a plasma of the process gas in the chamber to deposit lithium phosphorous oxynitride on the substrate.

Abstract: In a method of manufacturing a thin film battery in a chamber, a target comprising LiCoO2 is provided on a magnetron cathode in the chamber, and a substrate is placed facing the target. A process gas is introduced into the chamber and the process gas is energized to form a plasma to sputter the target to deposit LiCoO2 on the substrate. An ion flux of from about 0.1 to about 5 mA/cm2 is delivered from the plasma to the substrate to enhance the crystallinity of the deposited LiCoO2 material on the substrate. The process gas is exhausted from the chamber. The target can also be made of other materials.

Abstract: A thin film battery 10 comprises a substrate 12 which permits the battery 10 to be fabricated to provide higher energy density. In one embodiment, the substrate 12 of the battery 10 comprises mica. A crystalline lithium metal oxide film may be used as the cathode film 18.

Abstract: A composition suitable for treating metal surfaces prior to bonding of the surfaces to materials including metals, rubber, glass, polymers, sealants, coatings, and in particular polymeric adhesives, to enhance the strength of the bond and to prolong useful life in corrosive environments, is described.

Abstract: A wear-resistant component comprises a workpiece having a coating comprising at least one crystalline layer comprising metal boride and at least one amorphous layer comprising metal and boron. The amorphous layer can further comprise one or more of carbon, nitrogen, halogen, or hydrogen. Preferably, the coating comprises a plurality of composite layers, each composite layer comprises a crystalline titanium diboride layer and an amorphous layer comprising metal and boron. The wear-resistant component has a wear rate of 3.5×10−6 mm3/nm, which is about 250 times lower than that of an uncoated component.

Abstract: A composition suitable for treating metal surfaces prior to bonding of the surfaces to materials including metals, rubber, glass, polymers, sealants, coatings, and in particular polymeric adhesives, to enhance the strength of the bond and to prolong useful life in corrosive environments, is described. The composition comprises: (a) water; (b) metal alkoxide comprising M(OR).sub.