Patents by Inventor Su Yeon HONG

Su Yeon HONG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 9373496
    Abstract: Exemplary embodiments of the present invention provide a substrate recycling method and a recycled substrate. The method includes separating a substrate having a first surface from an epitaxial layer, performing a first etching of the first surface using electrochemical etching, and performing, after the first etching, a second etching of the first surface using chemical etching, dry etching, or performing, after the first etching, chemical mechanical polishing of the first surface.
    Type: Grant
    Filed: November 21, 2013
    Date of Patent: June 21, 2016
    Assignee: Seoul Viosys Co., Ltd.
    Inventors: Joo Won Choi, Chang Yeon Kim, Jeong Hoon Heo, Young Wug Kim, Su Yeon Hong, Sang Wan Ryu
  • Publication number: 20140138702
    Abstract: Exemplary embodiments of the present invention provide a substrate recycling method and a recycled substrate. The method includes separating a substrate having a first surface from an epitaxial layer, performing a first etching of the first surface using electrochemical etching, and performing, after the first etching, a second etching of the first surface using chemical etching, dry etching, or performing, after the first etching, chemical mechanical polishing of the first surface.
    Type: Application
    Filed: November 21, 2013
    Publication date: May 22, 2014
    Applicant: SEOUL VIOSYS CO., LTD.
    Inventors: Joo Won CHOI, Chang Yeon KIM, Jeong Hoon HEO, Young Wug KIM, Su Yeon HONG, Sang Wan RYU