Abstract: A device includes a fin extending from a semiconductor substrate; a gate stack over the fin; a first spacer on a sidewall of the gate stack; a source/drain region in the fin adjacent the first spacer; an inter-layer dielectric layer (ILD) extending over the gate stack, the first spacer, and the source/drain region, the ILD having a first portion and a second portion, wherein the second portion of the ILD is closer to the gate stack than the first portion of the ILD; a contact plug extending through the ILD and contacting the source/drain region; a second spacer on a sidewall of the contact plug; and an air gap between the first spacer and the second spacer, wherein the first portion of the ILD extends across the air gap and physically contacts the second spacer, wherein the first portion of the ILD seals the air gap.

Abstract: Disclosed is a process for identifying and extracting pain-related electroencephalogram (EEG) signals. The process comprises receiving, from one or more trials, EEG data for each trial; determining a current density for each signal; estimating the current density for a set of neural activity regions of interest, based on the computed current density; and computing at least one spectrum characteristic for each trial based on the estimated current density. Thus mean and variance of changes in the EEG data between EEG data labeled as being indicative of a pain state and EEG data labeled as being indicative of a non-pain state, for each neural activity region of interest can be calculated, and pain-related EEG signals can be identified based on at least one a region of interest at which the variance is below a predetermined threshold.