Patents by Inventor Subbash Gupta

Subbash Gupta has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Copper diffusion deterrent interface
    Patent number: 6987321
    Abstract: Method and product for forming a dual damascene interconnect structure, wherein depositing a copper sulfide interface layer as sidewalls to the opening deters migration or diffusing of copper ions into the dielectric material.
    Type: Grant
    Filed: November 21, 2003
    Date of Patent: January 17, 2006
    Assignee: Chartered Semiconductor Manufacturing Ltd.
    Inventors: Simon Chooi, Yakub Aliyu, Mei Sheng Zhou, John Leonard Sudijono, Subbash Gupta, Sudipto Ranendra Roy, Paul Kwok Keung Ho, Yi Xu
  • Method to create a copper diffusion deterrent interface
    Publication number: 20040227247
    Abstract: Method and product for forming a dual damascene interconnect structure, wherein depositing a copper sulfide interface layer as sidewalls to the opening deters migration or diffusing of copper ions into the dielectric material.
    Type: Application
    Filed: November 21, 2003
    Publication date: November 18, 2004
    Applicant: CHARTERED SEMICONDUCTOR MANFACTURING LTD.
    Inventors: Simon Chooi, Yakub Aliyu, Mei Sheng Zhou, John Leonard Sudijono, Subbash Gupta, Sudipto Ranendra Roy, Paul Kwok Keung Ho, Yi Xu