Patents by Inventor Subhash KUCHANURI

Subhash KUCHANURI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230215927
    Abstract: A semiconductor structure is provided. The semiconductor structure includes: a substrate; discrete channel structures on the substrate in device regions; a power rail line, located in the substrate of a power rail region; a gate structure, extending across the channel structures; source/drain doped regions, located in the channel structures on two sides of the gate structure; an interlayer dielectric layer, located at a side portion of the gate structure; a power rail contact plug, penetrating a partial thickness of the interlayer dielectric layer at a top of the power rail line, the power rail contact plug is in full contact with a top surface of the power rail line in a longitudinal direction; and a source/drain contact layer, located in the interlayer dielectric layer and in contact with the source/drain doped region, on a projection surface parallel to the substrate, the source/drain contact layer extends across the power rail line.
    Type: Application
    Filed: March 10, 2023
    Publication date: July 6, 2023
    Applicants: Semiconductor Manufacturing International (Shanghai) Corporation, Semiconductor Manufacturing International (Beijing) Corporation
    Inventors: Jisong JIN, Subhash KUCHANURI, Abraham YOO
  • Patent number: 11626497
    Abstract: A semiconductor structure and a forming method thereof are provided. In one form, a semiconductor structure includes: a substrate; discrete channel structures on the substrate in device regions; a power rail line, located in the substrate of a power rail region; a gate structure, extending across the channel structures; source/drain doped regions, located in the channel structures on two sides of the gate structure; an interlayer dielectric layer, located at a side portion of the gate structure; a power rail contact plug, penetrating a partial thickness of the interlayer dielectric layer at a top of the power rail line, where the power rail contact plug is in full contact with a top surface of the power rail line in a longitudinal direction; and a source/drain contact layer, located in the interlayer dielectric layer and in contact with the source/drain doped region, where on a projection surface parallel to the substrate, the source/drain contact layer extends across the power rail line.
    Type: Grant
    Filed: March 31, 2021
    Date of Patent: April 11, 2023
    Assignees: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION, SEMICONDUCTOR MANUFACTURING INTERNATIONAL (BEIJING) CORPORATION
    Inventors: Jisong Jin, Subhash Kuchanuri, Abraham Yoo
  • Publication number: 20220336344
    Abstract: A semiconductor device includes an insulator on a substrate and having opposite first and second sides that each extend along a first direction, a first fin pattern extending from a third side of the insulator along the first direction, a second fin pattern extending from a fourth side of the insulator along the first direction, and a first gate structure extending from the first side of the insulator along a second direction transverse to the first direction. The device further includes a second gate structure extending from the second side of the insulator along the second direction, a third fin pattern overlapped by the first gate structure, spaced apart from the first side of the insulator, and extending along the first direction, and a fourth fin pattern which overlaps the second gate structure, is spaced apart from the second side, and extends in the direction in which the second side extends.
    Type: Application
    Filed: June 29, 2022
    Publication date: October 20, 2022
    Inventors: Sidharth Rastogi, Subhash KUCHANURI, Jae Seok YANG, Kwan Young CHUN
  • Patent number: 11398425
    Abstract: A semiconductor device includes an insulator on a substrate and having opposite first and second sides that each extend along a first direction, a first fin pattern extending from a third side of the insulator along the first direction, a second fin pattern extending from a fourth side of the insulator along the first direction, and a first gate structure extending from the first side of the insulator along a second direction transverse to the first direction. The device further includes a second gate structure extending from the second side of the insulator along the second direction, a third fin pattern overlapped by the first gate structure, spaced apart from the first side of the insulator, and extending along the first direction, and a fourth fin pattern which overlaps the second gate structure, is spaced apart from the second side, and extends in the direction in which the second side extends.
    Type: Grant
    Filed: June 30, 2020
    Date of Patent: July 26, 2022
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Sidharth Rastogi, Subhash Kuchanuri, Jae Seok Yang, Kwan Young Chun
  • Publication number: 20220157957
    Abstract: A semiconductor structure and a forming method thereof are provided. In one form, a semiconductor structure includes: a substrate; discrete channel structures on the substrate in device regions; a power rail line, located in the substrate of a power rail region; a gate structure, extending across the channel structures; source/drain doped regions, located in the channel structures on two sides of the gate structure; an interlayer dielectric layer, located at a side portion of the gate structure; a power rail contact plug, penetrating a partial thickness of the interlayer dielectric layer at a top of the power rail line, where the power rail contact plug is in full contact with a top surface of the power rail line in a longitudinal direction; and a source/drain contact layer, located in the interlayer dielectric layer and in contact with the source/drain doped region, where on a projection surface parallel to the substrate, the source/drain contact layer extends across the power rail line.
    Type: Application
    Filed: March 31, 2021
    Publication date: May 19, 2022
    Applicants: Semiconductor Manufacturing International (Shanghai) Corporation, Semiconductor Manufacturing International (Beijing) Corporation
    Inventors: Jisong JIN, Subhash KUCHANURI, Abraham YOO
  • Patent number: 10903213
    Abstract: An integrated circuit device includes a substrate including a fin active region extending in a first direction, a gate line intersecting the fin active region and extending in a second direction perpendicular to the first direction, a power line electrically connected to source/drain regions at sides of the gate line on the fin active region, a pair of dummy gate lines intersecting the fin active region and extending in the second direction, and a device separation structure electrically connected to the pair of dummy gate lines and including a lower dummy contact plug between the pair of dummy gate lines on the fin active region and electrically connected to the power line, and an upper dummy contact plug on the lower dummy contact plug and on the pair of dummy gate lines to electrically connect the lower dummy contact plug to the pair of dummy gate lines.
    Type: Grant
    Filed: June 26, 2019
    Date of Patent: January 26, 2021
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Sidharth Rastogi, Subhash Kuchanuri, Raheel Azmat, Pan-jae Park, Chul-hong Park, Jae-seok Yang, Kwan-young Chun
  • Publication number: 20200328147
    Abstract: A semiconductor device includes an insulator on a substrate and having opposite first and second sides that each extend along a first direction, a first fin pattern extending from a third side of the insulator along the first direction, a second fin pattern extending from a fourth side of the insulator along the first direction, and a first gate structure extending from the first side of the insulator along a second direction transverse to the first direction. The device further includes a second gate structure extending from the second side of the insulator along the second direction, a third fin pattern overlapped by the first gate structure, spaced apart from the first side of the insulator, and extending along the first direction, and a fourth fin pattern which overlaps the second gate structure, is spaced apart from the second side, and extends in the direction in which the second side extends.
    Type: Application
    Filed: June 30, 2020
    Publication date: October 15, 2020
    Inventors: Sidharth Rastogi, Subhash KUCHANURI, Jae Seok YANG, Kwan Young CHUN
  • Patent number: 10699998
    Abstract: A semiconductor device includes an insulator on a substrate and having opposite first and second sides that each extend along a first direction, a first fin pattern extending from a third side of the insulator along the first direction, a second fin pattern extending from a fourth side of the insulator along the first direction, and a first gate structure extending from the first side of the insulator along a second direction transverse to the first direction. The device further includes a second gate structure extending from the second side of the insulator along the second direction, a third fin pattern overlapped by the first gate structure, spaced apart from the first side of the insulator, and extending along the first direction, and a fourth fin pattern which overlaps the second gate structure, is spaced apart from the second side, and extends in the direction in which the second side extends.
    Type: Grant
    Filed: March 27, 2018
    Date of Patent: June 30, 2020
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Sidharth Rastogi, Subhash Kuchanuri, Jae Seok Yang, Kwan Young Chun
  • Patent number: 10546855
    Abstract: Integrated circuit devices are provided. The IC devices may include an active region extending in a first direction, first and second gate electrodes extending in a second direction, a first impurity region in the active region adjacent a first side of the first gate electrode, a second impurity region in the active region between a second side of the first gate electrode and a first side of the second gate electrode, a third impurity region in the active region adjacent a second side of the second gate electrode, a cross gate contact electrically connecting the first and second impurity regions, a first contact electrically connected to the third impurity region, a first wire electrically connected to the cross gate contact, and a second wire electrically connected to the first contact. The first and second wires may extend only in the first direction and may be on the same line.
    Type: Grant
    Filed: March 30, 2017
    Date of Patent: January 28, 2020
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Rajeev Ranjan, Deepak Sharma, Subhash Kuchanuri, Chul Hong Park, Jae Seok Yang, Kwan Young Chun
  • Patent number: 10474783
    Abstract: A method of designing a layout of a semiconductor device includes designing layouts of cells, each layout including first conductive lines, the first conductive lines extending in a first direction and being spaced apart from each other in a second direction crossing the first direction, disposing the layouts of the cells to be adjacent to each other in the first direction, such that the first conductive lines in adjacent layouts of the cells are connected to each other, and disposing insulation blocks at a boundary area between adjacent ones of the layouts of the cells or in areas of the layouts of the cells adjacent to the boundary area, such that the insulation blocks block connections between some of the first conductive lines.
    Type: Grant
    Filed: September 12, 2017
    Date of Patent: November 12, 2019
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Sidharth Rastogi, Subhash Kuchanuri, Chul-Hong Park, Jae-Seok Yang
  • Publication number: 20190326285
    Abstract: An integrated circuit device includes a substrate including a fin active region extending in a first direction, a gate line intersecting the fin active region and extending in a second direction perpendicular to the first direction, a power line electrically connected to source/drain regions at sides of the gate line on the fin active region, a pair of dummy gate lines intersecting the fin active region and extending in the second direction, and a device separation structure electrically connected to the pair of dummy gate lines and including a lower dummy contact plug between the pair of dummy gate lines on the fin active region and electrically connected to the power line, and an upper dummy contact plug on the lower dummy contact plug and on the pair of dummy gate lines to electrically connect the lower dummy contact plug to the pair of dummy gate lines.
    Type: Application
    Filed: June 26, 2019
    Publication date: October 24, 2019
    Inventors: Sidharth RASTOGI, Subhash KUCHANURI, Raheel AZMAT, Pan-jae PARK, Chul-hong PARK, Jae-seok YANG, Kwan-young CHUN
  • Patent number: 10361198
    Abstract: An integrated circuit device includes a substrate including a fin active region extending in a first direction, a gate line intersecting the fin active region and extending in a second direction perpendicular to the first direction, a power line electrically connected to source/drain regions at sides of the gate line on the fin active region, a pair of dummy gate lines intersecting the fin active region and extending in the second direction, and a device separation structure electrically connected to the pair of dummy gate lines and including a lower dummy contact plug between the pair of dummy gate lines on the fin active region and electrically connected to the power line, and an upper dummy contact plug on the lower dummy contact plug and on the pair of dummy gate lines to electrically connect the lower dummy contact plug to the pair of dummy gate lines.
    Type: Grant
    Filed: May 24, 2017
    Date of Patent: July 23, 2019
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Sidharth Rastogi, Subhash Kuchanuri, Raheel Azmat, Pan-jae Park, Chul-hong Park, Jae-seok Yang, Kwan-young Chun
  • Publication number: 20190080998
    Abstract: A semiconductor device includes an insulator on a substrate and having opposite first and second sides that each extend along a first direction, a first fin pattern extending from a third side of the insulator along the first direction, a second fin pattern extending from a fourth side of the insulator along the first direction, and a first gate structure extending from the first side of the insulator along a second direction transverse to the first direction. The device further includes a second gate structure extending from the second side of the insulator along the second direction, a third fin pattern overlapped by the first gate structure, spaced apart from the first side of the insulator, and extending along the first direction, and a fourth fin pattern which overlaps the second gate structure, is spaced apart from the second side, and extends in the direction in which the second side extends.
    Type: Application
    Filed: March 27, 2018
    Publication date: March 14, 2019
    Inventors: Sidharth Rastogi, Subhash KUCHANURI, Jae Seok YANG, Kwan Young CHUN
  • Patent number: 10147684
    Abstract: An integrated circuit device includes: a pair of reference conductive lines arranged in parallel in a first direction in a first version logic cell and a pair of swap conductive lines arranged in parallel in a second version logic cell, wherein one reference conductive line and one swap conductive line in different wiring tracks of the pair of reference conductive lines and the pair of swap conductive lines have the same planar shape and the same length, and extend to intersect a cell boundary between the first version logic cell and the second version logic cell.
    Type: Grant
    Filed: November 16, 2017
    Date of Patent: December 4, 2018
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Subhash Kuchanuri, Sidharth Rastogi, Ranjan Rajeev, Chul-hong Park, Jae-seok Yang
  • Publication number: 20180342462
    Abstract: An integrated circuit device includes: a pair of reference conductive lines arranged in parallel in a first direction in a first version logic cell and a pair of swap conductive lines arranged in parallel in a second version logic cell, wherein one reference conductive line and one swap conductive line in different wiring tracks of the pair of reference conductive lines and the pair of swap conductive lines have the same planar shape and the same length, and extend to intersect a cell boundary between the first version logic cell and the second version logic cell.
    Type: Application
    Filed: November 16, 2017
    Publication date: November 29, 2018
    Inventors: Subhash KUCHANURI, Sidharth RASTOGI, Ranjan RAJEEV, Chul-hong PARK, Jae-seok YANG
  • Publication number: 20180157781
    Abstract: A method of designing a layout of a semiconductor device includes designing layouts of cells, each layout including first conductive lines, the first conductive lines extending in a first direction and being spaced apart from each other in a second direction crossing the first direction, disposing the layouts of the cells to be adjacent to each other in the first direction, such that the first conductive lines in adjacent layouts of the cells are connected to each other, and disposing insulation blocks at a boundary area between adjacent ones of the layouts of the cells or in areas of the layouts of the cells adjacent to the boundary area, such that the insulation blocks block connections between some of the first conductive lines.
    Type: Application
    Filed: September 12, 2017
    Publication date: June 7, 2018
    Inventors: Sidharth RASTOGI, Subhash KUCHANURI, Chul-Hong PARK, Jae-Seok YANG
  • Publication number: 20180102364
    Abstract: An integrated circuit device includes a substrate including a fin active region extending in a first direction, a gate line intersecting the fin active region and extending in a second direction perpendicular to the first direction, a power line electrically connected to source/drain regions at sides of the gate line on the fin active region, a pair of dummy gate lines intersecting the fin active region and extending in the second direction, and a device separation structure electrically connected to the pair of dummy gate lines and including a lower dummy contact plug between the pair of dummy gate lines on the fin active region and electrically connected to the power line, and an upper dummy contact plug on the lower dummy contact plug and on the pair of dummy gate lines to electrically connect the lower dummy contact plug to the pair of dummy gate lines.
    Type: Application
    Filed: May 24, 2017
    Publication date: April 12, 2018
    Inventors: Sidharth RASTOGI, Subhash KUCHANURI, Raheel AZMAT, Pan-jae PARK, Chul-hong PARK, Jae-seok YANG, Kwan-young CHUN
  • Publication number: 20180090492
    Abstract: Integrated circuit devices are provided. The IC devices may include an active region extending in a first direction, first and second gate electrodes extending in a second direction, a first impurity region in the active region adjacent a first side of the first gate electrode, a second impurity region in the active region between a second side of the first gate electrode and a first side of the second gate electrode, a third impurity region in the active region adjacent a second side of the second gate electrode, a cross gate contact electrically connecting the first and second impurity regions, a first contact electrically connected to the third impurity region, a first wire electrically connected to the cross gate contact, and a second wire electrically connected to the first contact. The first and second wires may extend only in the first direction and may be on the same line.
    Type: Application
    Filed: March 30, 2017
    Publication date: March 29, 2018
    Inventors: Rajeev RANJAN, Deepak SHARMA, Subhash KUCHANURI, Chul Hong PARK, Jae Seok YANG, Kwan Young CHUN