Patents by Inventor SUCK-HYUN KANG

SUCK-HYUN KANG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • NOZZLE AND APPARATUS FOR PROCESSING A SUBSTRATE INCLUDING THE SAME
    Publication number: 20150151336
    Abstract: A nozzle may include a nozzle body, a conductive line and a resistance-measuring member. The nozzle body may include a plurality of injecting holes. The conductive line may be disposed along the injecting holes. The resistance-measuring member may be configured to measure a resistance of the conductive line to detect a deformation of the injecting holes.
    Type: Application
    Filed: June 11, 2014
    Publication date: June 4, 2015
    Inventors: KYOUNG-SEOB KIM, SUCK-HYUN KANG, YONG-SUN KO, KYOUNG-HWAN KIM, KUN-TACK LEE, HYO-SAN LEE