Patents by Inventor Sudharshan P Pardhasaradhi

Sudharshan P Pardhasaradhi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Compensated mechanical testing system
    Patent number: 10571379
    Abstract: A mechanical testing system having a frame, and a stage for holding a sample. An arm for pressing a tool against a surface of the sample. A primary actuator is connected to the frame and applies a primary force and drives the tool relative to the sample, thereby causing the frame to flex. A displacement sensor measures a displacement value comprised of two components, the first component including a distance traveled by the probe into the sample as the primary force is applied, and the second component including a measure of a degree of flex of the frame as the primary force is applied. A compensating actuator is connected to the frame and applies a compensating force that reduces the second component of the displacement value.
    Type: Grant
    Filed: April 4, 2016
    Date of Patent: February 25, 2020
    Assignee: KLA-Tencor Corporation
    Inventors: Warren C Oliver, Sudharshan P Pardhasaradhi, Michael P Drake
  • Compensated Mechanical Testing System
    Publication number: 20170284912
    Abstract: A mechanical testing system having a frame, and a stage for holding a sample. An arm for pressing a tool against a surface of the sample. A primary actuator is connected to the frame and applies a primary force and drives the tool relative to the sample, thereby causing the frame to flex. A displacement sensor measures a displacement value comprised of two components, the first component including a distance traveled by the probe into the sample as the primary force is applied, and the second component including a measure of a degree of flex of the frame as the primary force is applied. A compensating actuator is connected to the frame and applies a compensating force that reduces the second component of the displacement value.
    Type: Application
    Filed: April 4, 2016
    Publication date: October 5, 2017
    Applicant: Nanomechanics, Inc.
    Inventors: Warren C Oliver, Sudharshan P Pardhasaradhi, Michael P Drake