Abstract: The sensor chips, processes and devices enable ultra-sensitive detection/determination, evaluation and quantitative measurement of analytes and are useful for high throughput and miniaturized assays, which enable a user to perform multiple, accurate, experiments in parallel with minimum amount of reagents resulting in low waste generation. The method enables screening of fluid samples to meet regulatory standards. The device comprises a pitted chip having a silicon-based substrate, optionally provided with an integrated heating element, a biosensor and a receptor immobilized on a cross linking element fixed to an inert metal layer in the chip. The analyte is detected up to 5 parts per trillion of the fluid sample and quantitatively measured up to 10 parts per trillion of the fluid sample by the device of the present disclosure.