Abstract: A device for examining an end part according to the present invention includes a light projecting portion, a light receiving portion, a displacement sensor amplifier, and a data processing apparatus. The light projecting portion projects light on the end part of a semiconductor wafer. The light receiving portion receives specular reflected light reflected from the end part of the semiconductor wafer. The displacement sensor amplifier and the data processing apparatus calculate the displacement amount of the end part of the semiconductor wafer by a change in the distribution of the quantity of the specular reflected light received by the light receiving portion. Thus, the device for examining an end part can be reduced in size and simplified. Additionally, the device for examining an end part can be obtained, with which a change of the material of the end part of a measurement target is hardly detected as defects falsely.

Abstract: An object is to reduce mutual interference between a plurality of sets of molds coupled to a common frame stand to improve the processing accuracy. A plurality of sets (e.g. two sets) of molds are driven by servo motors (6a, 6b). The servo motors (6a, 6b) are individually controlled by servo amplifiers (8a, 8b), respectively. A control portion in the servo amplifier (8a) calculates a current (I) so that the measured value (X) of the rotating position of the servo motor (6a) follows a directing value (X0) sent from a CPU through a pulse generator (9). A torque detecting/limiting portion (25) limits the calculated current (I) so that a limit value of the torque sent from the CPU through a DA converter (12) is not exceeded and sends it to the servo motor (6a) through a current amplifier (26). When the torque of the servo motor (6a) reaches the limit value after the molds come in contact, the directing value (X0) is rapidly advanced in the mold-losing direction.

Abstract: It is an object to obtain a press apparatus and a press controlling method which apply press working to a processed object with accurate press load and is capable of press working with accurate press load without affected by variations in thickness of the processed objects and variations in shut height of molds. A servo motor (51) is connected concentrically to a rotation transmitter (52), and a screw shaft (53) is provided passing through the center of the rotation transmitter (52). The driving force of the servo motor (51) is converted into a thrusting force of a press ram (54) by combining the rotation transmitter (52) and the screw shaft (53). Correct press load is applied to the processed objects and troubles in the press processing caused by variations in thickness of the processed objects can be prevented.