Patents by Inventor Sueng-uhn Kim

Sueng-uhn Kim has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Slurry supply system for chemical mechanical polishing process having sonic wave generator
    Patent number: 6287192
    Abstract: A system for supplying slurry to a processing facility, includes a tank containing the slurry, and slurry supply piping connected to the tank to allow the slurry to flow from the tank to the processing facility. A sonic wave generator is disposed along the slurry supply piping, such that sonic waves are propagated through the slurry. The sonic waves prevent the clustering of small primary abrasive particles into larger secondary abrasive particles, or break apart any clustered secondary particles, which may cause fine scratches on the surface of a wafer during a polishing operation.
    Type: Grant
    Filed: June 7, 1999
    Date of Patent: September 11, 2001
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Sue-ryeon Kim, Sueng-uhn Kim, Jae-kang Jeon, Sa-moon Hong