Abstract: The present invention provides a force sensor that is capable of detecting plastic deformation of a strain element. The force sensor detects components, in a plurality of directions, of a force exerted on the strain element. The force sensor includes: inspection strain gauges disposed in stress concentration areas of the strain element; and an inspection bridge circuit that includes the inspection strain gauges and that is configured to detect a component, in a specific direction, of a stress that occurs in the strain element.

Abstract: The present invention improves the reliability of a force sensor in terms of mechanical troubles. The force sensor includes: a primary bridge circuit that includes a first strain gauge group disposed on a first main face of a strain element and that is configured to detect a component, in a specific direction, of a force exerted on a strain element; and a secondary bridge circuit that includes a second strain gauge group disposed on a second main face of the strain element and that is configured to detect a component of a force in the same direction as the specific direction.

Abstract: The present invention achieves a force sensor in which an electrode, element, and/or the like connected to a strain gauge can be suitably attached to a strain element. The force sensor includes: a strain element including an arm portion that is deformable under an external force; and a strain gauge attached to the arm portion. The strain element includes a projection that sticks out from the arm portion in a direction intersecting the longitudinal direction of the arm portion.

Abstract: The present invention provides a force sensor that is capable of detecting plastic deformation of a strain element. The force sensor detects components, in a plurality of directions, of a force exerted on the strain element. The force sensor includes: inspection strain gauges disposed in stress concentration areas of the strain element; and an inspection bridge circuit that includes the inspection strain gauges and that is configured to detect a component, in a specific direction, of a stress that occurs in the strain element.

Abstract: The present invention improves the reliability of a force sensor in terms of mechanical troubles. The force sensor includes: a primary bridge circuit that includes a first strain gauge group disposed on a first main face of a strain element and that is configured to detect a component, in a specific direction, of a force exerted on a strain element; and a secondary bridge circuit that includes a second strain gauge group disposed on a second main face of the strain element and that is configured to detect a component of a force in the same direction as the specific direction.

Abstract: The present invention achieves a force sensor in which an electrode, element, and/or the like connected to a strain gauge can be suitably attached to a strain element. The force sensor includes: a strain element including an arm portion that is deformable under an external force; and a strain gauge attached to the arm portion. The strain element includes a projection that sticks out from the arm portion in a direction intersecting the longitudinal direction of the arm portion.