Abstract: An optical device has a first chip including a first waveguide and a first electrode, and a second chip mounted on the first chip and including a second waveguide and a second electrode. The second waveguide has an electro-optic effect higher than an electro-optic effect of the first waveguide and has a return structure that places an end of the second waveguide at an end face of the second chip. The second waveguide has been optically coupled to the first waveguide at the end face. The second electrode has a return structure that places an end of the second electrode at the end face, and the second electrode and the first electrode are electrically connected to each other in an area where the end of the second electrode has been placed.

Abstract: An X-ray generating apparatus provided with at least one deflecting means disposed between a freely selected pair of adjacent deflecting electromagnets and adapted to undulate electrons around a design orbit. When the deflecting means if formed of variable horizontally or vertically deflecting electromagnets capable of forming a variable magnetic field for electron on the orbit, the electrons are undulated around the design orbit and synchrotron radiation or powerful wiggler radiation from a wiggler is generated to irradiate a large area of a given substrate. Thus, in the transfer of patterns for the production of LSI devices for example, the X-ray generating apparatus enables highly intensive X-rays abundantly containing soft X-rays to be emitted uniformly to irradiate a wide area.