Abstract: A display device including: a base layer; a backplane structure provided on the base layer, the backplane structure including pixel circuits and a sensor circuit; a pixel layer provided on the backplane structure, the pixel layer including light emitting elements respectively connected to the pixel circuits and a light receiving element connected to the sensor circuit; an encapsulation layer covering the pixel layer; a light blocking member provided on the encapsulation layer, wherein the light blocking member Includes openings overlapping the light emitting elements and the light receiving element; and a color filter provided on the encapsulation layer and covering the light blocking member wherein the light emitting elements include light emitting layers, the light receiving element includes a light receiving layer, and at least one of the openings of the light blocking member overlaps one of the light emitting layers and the light receiving layer.

Abstract: Provided is a batch type substrate processing apparatus that generates plasma by a plurality of electrodes to perform a processing process on a substrate. The batch type substrate processing apparatus includes a reaction tube, a plurality of electrodes disposed to be spaced apart from each other, and an electrode protection part configured to protect the plurality of electrodes. The plurality of electrodes includes first and second power supply electrodes spaced apart from each other, and a ground electrode provided between the first power supply electrode and the second power supply electrode. The electrode protection part includes a plurality of first electrode protection tubes provided in the first and second power supply electrodes, respectively, a second electrode protection tube provided in the ground electrode, and a plurality of connection tubes configured to connect each of the plurality of first electrode protection tubes to the second electrode protection tube so as to communicate with each other.