Patents by Inventor Sukbyung Chae

Sukbyung Chae has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11721568
    Abstract: The present disclosure relates to a substrate transfer apparatus. The substrate transfer apparatus includes a first transfer apparatus, a second transfer apparatus, a substrate carrier driver, a sensor, a swing apparatus, and a controller. The first transfer apparatus is configured to transfer a substrate in a first direction. The second transfer apparatus is configured to receive the substrate from the first transfer apparatus and transfer the substrate and comprising a substrate carrier on which the substrate transferred from the first transfer apparatus is seated. The substrate carrier driver is configured to move the substrate carrier. The sensor is configured to detect an abnormal transfer of the substrate from the first transfer apparatus to the second transfer apparatus and generate a detection signal corresponding to the abnormal transfer of the substrate. The swing apparatus is configured to swing the substrate carrier.
    Type: Grant
    Filed: August 18, 2020
    Date of Patent: August 8, 2023
    Assignee: SAMSUNG ELECTRONICS CO., LTD.
    Inventors: Sangho Jang, Dongsoo Lee, Anhi Pyun, Jinyi Lee, Sukbyung Chae
  • Publication number: 20210193491
    Abstract: The present disclosure relates to a substrate transfer apparatus. The substrate transfer apparatus includes a first transfer apparatus, a second transfer apparatus, a substrate carrier driver, a sensor, a swing apparatus, and a controller. The first transfer apparatus is configured to transfer a substrate in a first direction. The second transfer apparatus is configured to receive the substrate from the first transfer apparatus and transfer the substrate and comprising a substrate carrier on which the substrate transferred from the first transfer apparatus is seated. The substrate carrier driver is configured to move the substrate carrier. The sensor is configured to detect an abnormal transfer of the substrate from the first transfer apparatus to the second transfer apparatus and generate a detection signal corresponding to the abnormal transfer of the substrate. The swing apparatus is configured to swing the substrate carrier.
    Type: Application
    Filed: August 18, 2020
    Publication date: June 24, 2021
    Inventors: SANGHO JANG, Dongsoo Lee, Anhi Pyun, Jinyi Lee, Sukbyung Chae
  • Patent number: 9669423
    Abstract: The present invention relates to a spark discharge generator. The spark discharge system of the present invention includes a plurality of columnar electrodes and a ground plate having a plurality of outlet holes at positions corresponding to the columnar electrodes. The use of the spark discharge generator enables the production of a three-dimensionally shaped nanostructure array on a large area in a uniform and rapid manner.
    Type: Grant
    Filed: December 19, 2013
    Date of Patent: June 6, 2017
    Assignees: Global Frontier Center—Multiscale Energy Systems, SNU R&DB Foundation
    Inventors: Man Soo Choi, Kyungyeon Ha, Hoseop Choi, Kyuhee Han, Kinam Jung, Dongjoon Lee, Sukbyung Chae
  • Publication number: 20150030781
    Abstract: The present invention relates to a spark discharge generator. The spark discharge system of the present invention includes a plurality of columnar electrodes and a ground plate having a plurality of outlet holes at positions corresponding to the columnar electrodes. The use of the spark discharge generator enables the production of a three-dimensionally shaped nanostructure array on a large area in a uniform and rapid manner.
    Type: Application
    Filed: December 19, 2013
    Publication date: January 29, 2015
    Inventors: Man Soo Choi, Kyungyeon Ha, Hoseop Choi, Kyuhee Han, Kinam Jung, Dongjoon Lee, Sukbyung Chae