Abstract: A gas supplying apparatus for supplying deposition gas onto a substrate surface, the gas supplying apparatus comprising: a gas supplying ring with one or more gas supplying channels formed along the interior of the gas supplying ring and with a plurality of gas distribution channels directed toward a center of the gas supplying ring; and a plurality of adapters with gas nozzles connecting to the gas distribution channels, respectively, that detachably connect to the interior of the gas supplying ring, wherein the gas nozzles have a variety of injection configurations.

Abstract: An apparatus for inspecting a collimator including a pigtail formed with first and second fibers, a GRIN lens disposed coaxially relative to the pigtail, and a glass tube supporting the pigtail and the GRIN lens in a single unit, to inspect optical properties of the collimator, comprising an inspection table; a gripping part, which is provided on the inspection table, gripping the collimator subject to inspection; a light supplying part transmitting a predetermined optical signal to the first fiber; a light receiving part, which is connected to the second fiber, receiving an optical signal returned from the second fiber, entering the first fiber; a measuring part calculating a value of the predetermined optical signal, which entered the first fiber, and a value of the optical signal, which returned from the second fiber; and an image displaying part displaying the value obtained from the measuring part.

Abstract: An apparatus for inspecting a collimator including a pigtail to which a fiber is connected to transmit an optical signal, a GRIN lens coaxially arranged with the pigtail, a glass tube accommodating and supporting the pigtail and the GRIN lens, and a metal sleeve protecting the glass tube, comprising an inspection table; a grip part provided on the inspection table, and gripping the collimator to be inspected; a first camera provided over the grip part having an axis perpendicular to a length of the collimator, and photographing the collimator along the length of the collimator; a second camera arranged coaxially with the collimator on the inspection table, and photographing the collimator perpendicular to an axis of the collimator; and a displaying part connected to the first and second camera, and displaying pictures transmitted from the first and second cameras.

Abstract: An apparatus for inspecting a collimator including a pigtail formed with first and second fibers, a GRIN lens disposed coaxially relative to the pigtail, and a glass tube supporting the pigtail and the GRIN lens in a single unit, to inspect optical properties of the collimator, comprising an inspection table; a gripping part, which is provided on the inspection table, gripping the collimator subject to inspection; a light supplying part transmitting a predetermined optical signal to the first fiber; a light receiving part, which is connected to the second fiber, receiving an optical signal returned from the second fiber, entering the first fiber; a measuring part calculating a value of the predetermined optical signal, which entered the first fiber, and a value of the optical signal, which returned from the second fiber; and an image displaying part displaying the value obtained from the measuring part.

Abstract: an apparatus for inspecting a collimator including a pigtail to which a fiber is connected to transmit an optical signal, a GRIN lens coaxially arranged with the pigtail, a glass tube accommodating and supporting the pigtail and the GRIN lens, and a metal sleeve protecting the glass tube, comprising an inspection table; a grip part provided on the inspection table, and gripping the collimator to be inspected; a first camera provided over the grip part having an axis perpendicular to a length of the collimator, and photographing the collimator along the length of the collimator; a second camera arranged coaxially with the collimator on the inspection table, and photographing the collimator perpendicular to an axis of the collimator; and a displaying part connected to the first and second camera, and displaying pictures transmitted from the first and second cameras.

Abstract: An apparatus for manufacturing a collimator by attaching a glass tube assembly, which includes a pigtail having a fiber, and a GRIN lens, which is coaxially arranged with the pigtail, into a metal sleeve having a tube shape. The apparatus includes a supporting part, a sleeve grip part connected to the supporting part and having at least one holder for disposing the metal sleeve therein, a fiber chucking part provided above the sleeve grip part and chucking the fiber, and a lift unit lifting and lowering the fiber chucking part to control the glass tube assembly inserted in the metal sleeve to move up and down along a longitudinal direction of the metal sleeve. With this configuration, the glass tube assembly is conveniently fixedly fitted into the metal sleeve.