Patents by Inventor Suk-Fill Yun

Suk-Fill Yun has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus for dispensing photo-resist in semiconductor device fabrication equipment
    Patent number: 7635410
    Abstract: A photo-resist dispensing apparatus is disclosed and comprises; a tank adapted to hold a photo-resist solution, a pump unit adapted to pump the photo-resist solution from the tank, a filter unit adapted to receive the photo-resist solution from the pump unit, and at least one of a first gas discharge unit connected to the tank and adapted to remove gas bubbles from the photo-resist solution held in the tank, and a second gas discharge unit connected to the filter unit and adapted to remove gas bubbles from the photo-resist solution in the filter.
    Type: Grant
    Filed: June 14, 2006
    Date of Patent: December 22, 2009
    Assignee: Samsung Electronics Co., Ltd.
    Inventors: Jin-Jun Park, Suk-Fill Yun
  • Apparatus for dispensing photo-resist in semiconductor device fabrication equipment
    Publication number: 20070119307
    Abstract: A photo-resist dispensing apparatus is disclosed and comprises; a tank adapted to hold a photo-resist solution, a pump unit adapted to pump the photo-resist solution from the tank, a filter unit adapted to receive the photo-resist solution from the pump unit, and at least one of a first gas discharge unit connected to the tank and adapted to remove gas bubbles from the photo-resist solution held in the tank, and a second gas discharge unit connected to the filter unit and adapted to remove gas bubbles from the photo-resist solution in the filter.
    Type: Application
    Filed: June 14, 2006
    Publication date: May 31, 2007
    Inventors: Jin-Jun Park, Suk-Fill Yun