Abstract: A substrate transferring apparatus capable of reducing a nitrogen gas for purging and a shutdown time thereof. The Substrate transferring apparatus includes a ventilation driving room, a FOUP receiving room, a driving equipment room and a ventilation duct. The ventilation driving room is equipped with a main fan for blowing air downward. The FOUP receiving room is disposed under the ventilation driving room and accommodates a FOUP for storing a substrate. The driving equipment room is disposed under the FOUP receiving room. The ventilation duct connects the FOUP receiving room and the ventilation driving room.

Abstract: A phase detection apparatus for receiving an I-channel signal an a Q-channel signal as a received signal modulated with a quadrature phase-shift keying and compensating a phase rotation error of the received signal, includes: a phase detector for detecting a phase error through the use of the I- and Q-channel signals and providing an error signal; a shifting unit for shifting said I-channel signal by a plurality of predetermined different numbers of bits and providing shifted I-channel signals; a first multiplexing unit, in response to an external selection signal, for selecting signals among said shifted I-channel signals; a subtracting unit for providing difference signals between said selected signals and said Q-channel signal; a comparison unit for comparing said difference signals with a reference signal and producing logic signals; a logic gate for producing a logically ORed signal of said produced logic signals; and a second multiplexing unit, in response to said ORed signal, for selecting a signal fro